1. Semitool Spin Rinser Dryer

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  2. Mask-Aligner Süss MA 6

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  3. Mask-Aligner Süss MA 150

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  4. HMDS-Hotplate Süss VP8 T/BM

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  5. Spraycoater Süss AS8

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation