Polycrystalline Diamond Micro‐Hotplates

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  • Cardiff University
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Details

Original languageEnglish
Article number2303976
JournalSMALL
Volume19
Issue number48
Publication statusPublished - 28 Nov 2023
Externally publishedYes

Abstract

Micro-hotplate structures are increasingly being investigated for use in a host of applications ranging from broadband infra-red sources within absorption-based gas sensors to in situ heater stages for ultra-high-resolution imaging. With devices usually fabricated from a conductive electrode placed on top of a freestanding radiator element, coefficient of thermal expansion (CTE) mismatches between layers and electro-migration within the heating element typically lead to failure upon exceeding temperatures of 1600 K. In an attempt to mitigate such issues, a series of hotplates of varying geometry have been fabricated from a single layer of mechanically robust, high thermal conductivity, and low CTE boron-doped polycrystalline diamond. Upon testing under high vacuum conditions and characterization of the emission spectra, the resulting devices are shown to exhibit a grey-body like emission response and reach temperatures vastly in excess of conventional geometries of up to 2731 K at applied powers of ⩽100 mW. Characterization of the thermalization time meanwhile demonstrates rapid millisecond response times, while Raman spectroscopy reveals the performance of the devices is dictated by cumulative graphitization at elevated temperatures. As such, both diamond and sp 2 carbon are shown to be promising materials for the fabrication of next-generation micro-hotplates.

Keywords

    carbon, diamonds, micro-electro-mechanical systems (MEMS), micro-hotplate

ASJC Scopus subject areas

Cite this

Polycrystalline Diamond Micro‐Hotplates. / Thomas, Evan L. H.; Stritt, Jaspa; Mandal, Soumen et al.
In: SMALL, Vol. 19, No. 48, 2303976, 28.11.2023.

Research output: Contribution to journalArticleResearchpeer review

Thomas, ELH, Stritt, J, Mandal, S, Imboden, M & Williams, OA 2023, 'Polycrystalline Diamond Micro‐Hotplates', SMALL, vol. 19, no. 48, 2303976. https://doi.org/10.1002/smll.202303976
Thomas, E. L. H., Stritt, J., Mandal, S., Imboden, M., & Williams, O. A. (2023). Polycrystalline Diamond Micro‐Hotplates. SMALL, 19(48), Article 2303976. https://doi.org/10.1002/smll.202303976
Thomas ELH, Stritt J, Mandal S, Imboden M, Williams OA. Polycrystalline Diamond Micro‐Hotplates. SMALL. 2023 Nov 28;19(48):2303976. doi: 10.1002/smll.202303976
Thomas, Evan L. H. ; Stritt, Jaspa ; Mandal, Soumen et al. / Polycrystalline Diamond Micro‐Hotplates. In: SMALL. 2023 ; Vol. 19, No. 48.
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