Details
| Original language | English |
|---|---|
| Article number | 2303976 |
| Journal | SMALL |
| Volume | 19 |
| Issue number | 48 |
| Publication status | Published - Nov 2023 |
| Externally published | Yes |
Abstract
Micro-hotplate structures are increasingly being investigated for use in a host of applications ranging from broadband infra-red sources within absorption-based gas sensors to in situ heater stages for ultra-high-resolution imaging. With devices usually fabricated from a conductive electrode placed on top of a freestanding radiator element, coefficient of thermal expansion (CTE) mismatches between layers and electro-migration within the heating element typically lead to failure upon exceeding temperatures of 1600 K. In an attempt to mitigate such issues, a series of hotplates of varying geometry have been fabricated from a single layer of mechanically robust, high thermal conductivity, and low CTE boron-doped polycrystalline diamond. Upon testing under high vacuum conditions and characterization of the emission spectra, the resulting devices are shown to exhibit a grey-body like emission response and reach temperatures vastly in excess of conventional geometries of up to 2731 K at applied powers of ⩽100 mW. Characterization of the thermalization time meanwhile demonstrates rapid millisecond response times, while Raman spectroscopy reveals the performance of the devices is dictated by cumulative graphitization at elevated temperatures. As such, both diamond and sp 2 carbon are shown to be promising materials for the fabrication of next-generation micro-hotplates.
Keywords
- carbon, diamonds, micro-electro-mechanical systems (MEMS), micro-hotplate
ASJC Scopus subject areas
- Engineering(all)
- Engineering (miscellaneous)
- Chemistry(all)
- Materials Science(all)
- Biochemistry, Genetics and Molecular Biology(all)
- Biotechnology
- Materials Science(all)
- Biomaterials
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In: SMALL, Vol. 19, No. 48, 2303976, 11.2023.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Polycrystalline Diamond Micro‐Hotplates
AU - Thomas, Evan L. H.
AU - Stritt, Jaspa
AU - Mandal, Soumen
AU - Imboden, Matthias
AU - Williams, Oliver A.
N1 - Publisher Copyright: © 2023 The Authors. Small published by Wiley-VCH GmbH.
PY - 2023/11
Y1 - 2023/11
N2 - Micro-hotplate structures are increasingly being investigated for use in a host of applications ranging from broadband infra-red sources within absorption-based gas sensors to in situ heater stages for ultra-high-resolution imaging. With devices usually fabricated from a conductive electrode placed on top of a freestanding radiator element, coefficient of thermal expansion (CTE) mismatches between layers and electro-migration within the heating element typically lead to failure upon exceeding temperatures of 1600 K. In an attempt to mitigate such issues, a series of hotplates of varying geometry have been fabricated from a single layer of mechanically robust, high thermal conductivity, and low CTE boron-doped polycrystalline diamond. Upon testing under high vacuum conditions and characterization of the emission spectra, the resulting devices are shown to exhibit a grey-body like emission response and reach temperatures vastly in excess of conventional geometries of up to 2731 K at applied powers of ⩽100 mW. Characterization of the thermalization time meanwhile demonstrates rapid millisecond response times, while Raman spectroscopy reveals the performance of the devices is dictated by cumulative graphitization at elevated temperatures. As such, both diamond and sp 2 carbon are shown to be promising materials for the fabrication of next-generation micro-hotplates.
AB - Micro-hotplate structures are increasingly being investigated for use in a host of applications ranging from broadband infra-red sources within absorption-based gas sensors to in situ heater stages for ultra-high-resolution imaging. With devices usually fabricated from a conductive electrode placed on top of a freestanding radiator element, coefficient of thermal expansion (CTE) mismatches between layers and electro-migration within the heating element typically lead to failure upon exceeding temperatures of 1600 K. In an attempt to mitigate such issues, a series of hotplates of varying geometry have been fabricated from a single layer of mechanically robust, high thermal conductivity, and low CTE boron-doped polycrystalline diamond. Upon testing under high vacuum conditions and characterization of the emission spectra, the resulting devices are shown to exhibit a grey-body like emission response and reach temperatures vastly in excess of conventional geometries of up to 2731 K at applied powers of ⩽100 mW. Characterization of the thermalization time meanwhile demonstrates rapid millisecond response times, while Raman spectroscopy reveals the performance of the devices is dictated by cumulative graphitization at elevated temperatures. As such, both diamond and sp 2 carbon are shown to be promising materials for the fabrication of next-generation micro-hotplates.
KW - carbon
KW - diamonds
KW - micro-electro-mechanical systems (MEMS)
KW - micro-hotplate
UR - http://www.scopus.com/inward/record.url?scp=85166354062&partnerID=8YFLogxK
U2 - 10.1002/smll.202303976
DO - 10.1002/smll.202303976
M3 - Article
VL - 19
JO - SMALL
JF - SMALL
SN - 1613-6810
IS - 48
M1 - 2303976
ER -