Modelling Deposition Uniformity in Microwave Plasma CVD Diamond over 2“ Si wafers

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

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  • Cardiff University
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Original languageUndefined/Unknown
Title of host publication2022 Asia-Pacific Microwave Conference (APMC)
Publication statusPublished - 29 Nov 2022
Externally publishedYes

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Modelling Deposition Uniformity in Microwave Plasma CVD Diamond over 2“ Si wafers. / Cuenca, Jerome A.; Leigh, William; Thomas, Evan L.H. et al.
2022 Asia-Pacific Microwave Conference (APMC). 2022.

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Cuenca, JA, Leigh, W, Thomas, ELH, Mandal, S & Williams, OA 2022, Modelling Deposition Uniformity in Microwave Plasma CVD Diamond over 2“ Si wafers. in 2022 Asia-Pacific Microwave Conference (APMC). https://doi.org/10.23919/apmc55665.2022.9999754
Cuenca, J. A., Leigh, W., Thomas, E. L. H., Mandal, S., & Williams, O. A. (2022). Modelling Deposition Uniformity in Microwave Plasma CVD Diamond over 2“ Si wafers. In 2022 Asia-Pacific Microwave Conference (APMC) https://doi.org/10.23919/apmc55665.2022.9999754
Cuenca JA, Leigh W, Thomas ELH, Mandal S, Williams OA. Modelling Deposition Uniformity in Microwave Plasma CVD Diamond over 2“ Si wafers. In 2022 Asia-Pacific Microwave Conference (APMC). 2022 doi: 10.23919/apmc55665.2022.9999754
Cuenca, Jerome A. ; Leigh, William ; Thomas, Evan L.H. et al. / Modelling Deposition Uniformity in Microwave Plasma CVD Diamond over 2“ Si wafers. 2022 Asia-Pacific Microwave Conference (APMC). 2022.
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title = "Modelling Deposition Uniformity in Microwave Plasma CVD Diamond over 2“ Si wafers",
author = "Cuenca, {Jerome A.} and William Leigh and Thomas, {Evan L.H.} and Soumen Mandal and Williams, {Oliver A.}",
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T1 - Modelling Deposition Uniformity in Microwave Plasma CVD Diamond over 2“ Si wafers

AU - Cuenca, Jerome A.

AU - Leigh, William

AU - Thomas, Evan L.H.

AU - Mandal, Soumen

AU - Williams, Oliver A.

PY - 2022/11/29

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M3 - Aufsatz in Konferenzband

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