Details
Original language | Undefined/Unknown |
---|---|
Title of host publication | 2022 Asia-Pacific Microwave Conference (APMC) |
Publication status | Published - 29 Nov 2022 |
Externally published | Yes |
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2022 Asia-Pacific Microwave Conference (APMC). 2022.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Modelling Deposition Uniformity in Microwave Plasma CVD Diamond over 2“ Si wafers
AU - Cuenca, Jerome A.
AU - Leigh, William
AU - Thomas, Evan L.H.
AU - Mandal, Soumen
AU - Williams, Oliver A.
PY - 2022/11/29
Y1 - 2022/11/29
UR - http://dx.doi.org/10.23919/apmc55665.2022.9999754
U2 - 10.23919/apmc55665.2022.9999754
DO - 10.23919/apmc55665.2022.9999754
M3 - Aufsatz in Konferenzband
BT - 2022 Asia-Pacific Microwave Conference (APMC)
ER -