Focus-based automated alignment for laser direct writing

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

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Original languageEnglish
Title of host publicationDigital Optical Technologies 2023
EditorsBernard C. Kress, Jurgen W. Czarske
PublisherSPIE
ISBN (electronic)9781510664579
Publication statusPublished - 7 Aug 2023
EventSPIE Digital Optical Technologies - Munich, Germany
Duration: 26 Jun 202330 Jun 2023

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume12624
ISSN (Print)0277-786X
ISSN (electronic)1996-756X

Abstract

We aim to integrate two-photon polymerization (TPP) in a fully digitalized and automated workflow for micro- and nanooptics production. This requires linking the coordinate system of the writing laser scanner to the geometry of the sample or previously fabricated structures on the sample. We developed a fast layer detection algorithm, which determines the axial position and the tilt angles of both interface planes of the photosensitive material using the integrated microscope camera of the TPP system. Furthermore, we identify the shear angles between the camera and the lateral scanner axes. The individual measurement results are stored and accessible via direct-written identification QR code on the sample itself. This is an important step towards an individualized automatic workflow based on digital twins.

Keywords

    additive manufacturing, automation, camera calibration, digital twins, focus detection, laser direct writing, two-photon-polymerization

ASJC Scopus subject areas

Cite this

Focus-based automated alignment for laser direct writing. / Caspary, Reinhard; Zheng, Lei; Günther, Axel et al.
Digital Optical Technologies 2023. ed. / Bernard C. Kress; Jurgen W. Czarske. SPIE, 2023. 126240C (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12624).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Caspary, R, Zheng, L, Günther, A & Roth, B 2023, Focus-based automated alignment for laser direct writing. in BC Kress & JW Czarske (eds), Digital Optical Technologies 2023., 126240C, Proceedings of SPIE - The International Society for Optical Engineering, vol. 12624, SPIE, SPIE Digital Optical Technologies, Munich, Germany, 26 Jun 2023. https://doi.org/10.1117/12.2675821
Caspary, R., Zheng, L., Günther, A., & Roth, B. (2023). Focus-based automated alignment for laser direct writing. In B. C. Kress, & J. W. Czarske (Eds.), Digital Optical Technologies 2023 Article 126240C (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12624). SPIE. https://doi.org/10.1117/12.2675821
Caspary R, Zheng L, Günther A, Roth B. Focus-based automated alignment for laser direct writing. In Kress BC, Czarske JW, editors, Digital Optical Technologies 2023. SPIE. 2023. 126240C. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.2675821
Caspary, Reinhard ; Zheng, Lei ; Günther, Axel et al. / Focus-based automated alignment for laser direct writing. Digital Optical Technologies 2023. editor / Bernard C. Kress ; Jurgen W. Czarske. SPIE, 2023. (Proceedings of SPIE - The International Society for Optical Engineering).
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