Details
| Original language | English |
|---|---|
| Title of host publication | Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII |
| Editors | Georg von Freymann, Eva Blasco, Debashis Chanda |
| Publisher | SPIE |
| ISBN (electronic) | 9781510670563 |
| Publication status | Published - 2024 |
| Event | Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII 2024 - San Francisco, United States Duration: 28 Jan 2024 → 31 Jan 2024 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 12898 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
Selective laser etching (SLE) enables highly precise 3-dimensional structuring of glasses with a resolution of a few µm. The procedure requires two main process steps. First, the desired structure design created beforehand is transferred inside the glass by a fs-pulsed laser. Subsequently, the glass is placed in acid or a lye, respectively, to etch the modified area. Hereby, the required liquid for the post-processing step depends on the used glass type. In our work, we performed a detailed investigation of the structuring of fused silica with subsequent etching by KOH solution. We studied the influence of different writing parameters such as laser power, repetition rate, polarization, stage motion speed and hatching distance towards an optimized surface roughness which is crucial for optical applications. Hereby, we were able to reliably achieve surface roughness values of ~40 nm and realize first waveguiding structures. Additionally, we also structured the glass periodically with feature sizes of less than 1 µm. The process developed is not limited to the structuring of flat glass substrates. Also standard glass fibers were employed to realize free access to the fiber core and create integrated optical structures for sensing. We will present our latest results of structuring and etching different types of glasses and geometries achieved by varying the laser parameters with and without a subsequent tempering step. Various optical structures were created and characterized as well as their feasibility for utilization as optical sensors demonstrated.
Keywords
- Diffractive elements, Optical Manufacturing, Selective laser etching, Substractive manufacturing
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- Harvard
- Apa
- Vancouver
- BibTeX
- RIS
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII. ed. / Georg von Freymann; Eva Blasco; Debashis Chanda. SPIE, 2024. 128980B (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12898).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Flexible manufacturing of optical structures with low surface roughness in fused silica using selective laser etching
AU - Günther, Axel
AU - Philip, Denny
AU - Zheng, Lei
AU - Kowalsky, Wolfgang
AU - Roth, B.
N1 - Publisher Copyright: © 2024 SPIE.
PY - 2024
Y1 - 2024
N2 - Selective laser etching (SLE) enables highly precise 3-dimensional structuring of glasses with a resolution of a few µm. The procedure requires two main process steps. First, the desired structure design created beforehand is transferred inside the glass by a fs-pulsed laser. Subsequently, the glass is placed in acid or a lye, respectively, to etch the modified area. Hereby, the required liquid for the post-processing step depends on the used glass type. In our work, we performed a detailed investigation of the structuring of fused silica with subsequent etching by KOH solution. We studied the influence of different writing parameters such as laser power, repetition rate, polarization, stage motion speed and hatching distance towards an optimized surface roughness which is crucial for optical applications. Hereby, we were able to reliably achieve surface roughness values of ~40 nm and realize first waveguiding structures. Additionally, we also structured the glass periodically with feature sizes of less than 1 µm. The process developed is not limited to the structuring of flat glass substrates. Also standard glass fibers were employed to realize free access to the fiber core and create integrated optical structures for sensing. We will present our latest results of structuring and etching different types of glasses and geometries achieved by varying the laser parameters with and without a subsequent tempering step. Various optical structures were created and characterized as well as their feasibility for utilization as optical sensors demonstrated.
AB - Selective laser etching (SLE) enables highly precise 3-dimensional structuring of glasses with a resolution of a few µm. The procedure requires two main process steps. First, the desired structure design created beforehand is transferred inside the glass by a fs-pulsed laser. Subsequently, the glass is placed in acid or a lye, respectively, to etch the modified area. Hereby, the required liquid for the post-processing step depends on the used glass type. In our work, we performed a detailed investigation of the structuring of fused silica with subsequent etching by KOH solution. We studied the influence of different writing parameters such as laser power, repetition rate, polarization, stage motion speed and hatching distance towards an optimized surface roughness which is crucial for optical applications. Hereby, we were able to reliably achieve surface roughness values of ~40 nm and realize first waveguiding structures. Additionally, we also structured the glass periodically with feature sizes of less than 1 µm. The process developed is not limited to the structuring of flat glass substrates. Also standard glass fibers were employed to realize free access to the fiber core and create integrated optical structures for sensing. We will present our latest results of structuring and etching different types of glasses and geometries achieved by varying the laser parameters with and without a subsequent tempering step. Various optical structures were created and characterized as well as their feasibility for utilization as optical sensors demonstrated.
KW - Diffractive elements
KW - Optical Manufacturing
KW - Selective laser etching
KW - Substractive manufacturing
UR - http://www.scopus.com/inward/record.url?scp=85212215214&partnerID=8YFLogxK
U2 - 10.1117/12.3000221
DO - 10.1117/12.3000221
M3 - Conference contribution
AN - SCOPUS:85212215214
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII
A2 - von Freymann, Georg
A2 - Blasco, Eva
A2 - Chanda, Debashis
PB - SPIE
T2 - Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII 2024
Y2 - 28 January 2024 through 31 January 2024
ER -