Flexible manufacturing of optical structures with low surface roughness in fused silica using selective laser etching

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OriginalspracheEnglisch
Titel des SammelwerksAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII
Herausgeber/-innenGeorg von Freymann, Eva Blasco, Debashis Chanda
Herausgeber (Verlag)SPIE
ISBN (elektronisch)9781510670563
PublikationsstatusVeröffentlicht - 2024
VeranstaltungAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII 2024 - San Francisco, USA / Vereinigte Staaten
Dauer: 28 Jan. 202431 Jan. 2024

Publikationsreihe

NameProceedings of SPIE - The International Society for Optical Engineering
Band12898
ISSN (Print)0277-786X
ISSN (elektronisch)1996-756X

Abstract

Selective laser etching (SLE) enables highly precise 3-dimensional structuring of glasses with a resolution of a few µm. The procedure requires two main process steps. First, the desired structure design created beforehand is transferred inside the glass by a fs-pulsed laser. Subsequently, the glass is placed in acid or a lye, respectively, to etch the modified area. Hereby, the required liquid for the post-processing step depends on the used glass type. In our work, we performed a detailed investigation of the structuring of fused silica with subsequent etching by KOH solution. We studied the influence of different writing parameters such as laser power, repetition rate, polarization, stage motion speed and hatching distance towards an optimized surface roughness which is crucial for optical applications. Hereby, we were able to reliably achieve surface roughness values of ~40 nm and realize first waveguiding structures. Additionally, we also structured the glass periodically with feature sizes of less than 1 µm. The process developed is not limited to the structuring of flat glass substrates. Also standard glass fibers were employed to realize free access to the fiber core and create integrated optical structures for sensing. We will present our latest results of structuring and etching different types of glasses and geometries achieved by varying the laser parameters with and without a subsequent tempering step. Various optical structures were created and characterized as well as their feasibility for utilization as optical sensors demonstrated.

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Flexible manufacturing of optical structures with low surface roughness in fused silica using selective laser etching. / Günther, Axel; Philip, Denny; Zheng, Lei et al.
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII. Hrsg. / Georg von Freymann; Eva Blasco; Debashis Chanda. SPIE, 2024. 128980B (Proceedings of SPIE - The International Society for Optical Engineering; Band 12898).

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschungPeer-Review

Günther, A, Philip, D, Zheng, L, Kowalsky, W & Roth, B 2024, Flexible manufacturing of optical structures with low surface roughness in fused silica using selective laser etching. in G von Freymann, E Blasco & D Chanda (Hrsg.), Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII., 128980B, Proceedings of SPIE - The International Society for Optical Engineering, Bd. 12898, SPIE, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII 2024, San Francisco, USA / Vereinigte Staaten, 28 Jan. 2024. https://doi.org/10.1117/12.3000221
Günther, A., Philip, D., Zheng, L., Kowalsky, W., & Roth, B. (2024). Flexible manufacturing of optical structures with low surface roughness in fused silica using selective laser etching. In G. von Freymann, E. Blasco, & D. Chanda (Hrsg.), Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII Artikel 128980B (Proceedings of SPIE - The International Society for Optical Engineering; Band 12898). SPIE. https://doi.org/10.1117/12.3000221
Günther A, Philip D, Zheng L, Kowalsky W, Roth B. Flexible manufacturing of optical structures with low surface roughness in fused silica using selective laser etching. in von Freymann G, Blasco E, Chanda D, Hrsg., Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII. SPIE. 2024. 128980B. (Proceedings of SPIE - The International Society for Optical Engineering). Epub 2024 Mär 13. doi: 10.1117/12.3000221
Günther, Axel ; Philip, Denny ; Zheng, Lei et al. / Flexible manufacturing of optical structures with low surface roughness in fused silica using selective laser etching. Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII. Hrsg. / Georg von Freymann ; Eva Blasco ; Debashis Chanda. SPIE, 2024. (Proceedings of SPIE - The International Society for Optical Engineering).
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abstract = "Selective laser etching (SLE) enables highly precise 3-dimensional structuring of glasses with a resolution of a few µm. The procedure requires two main process steps. First, the desired structure design created beforehand is transferred inside the glass by a fs-pulsed laser. Subsequently, the glass is placed in acid or a lye, respectively, to etch the modified area. Hereby, the required liquid for the post-processing step depends on the used glass type. In our work, we performed a detailed investigation of the structuring of fused silica with subsequent etching by KOH solution. We studied the influence of different writing parameters such as laser power, repetition rate, polarization, stage motion speed and hatching distance towards an optimized surface roughness which is crucial for optical applications. Hereby, we were able to reliably achieve surface roughness values of ~40 nm and realize first waveguiding structures. Additionally, we also structured the glass periodically with feature sizes of less than 1 µm. The process developed is not limited to the structuring of flat glass substrates. Also standard glass fibers were employed to realize free access to the fiber core and create integrated optical structures for sensing. We will present our latest results of structuring and etching different types of glasses and geometries achieved by varying the laser parameters with and without a subsequent tempering step. Various optical structures were created and characterized as well as their feasibility for utilization as optical sensors demonstrated.",
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AU - Günther, Axel

AU - Philip, Denny

AU - Zheng, Lei

AU - Kowalsky, Wolfgang

AU - Roth, B.

N1 - Publisher Copyright: © 2024 SPIE.

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