Details
| Originalsprache | Englisch |
|---|---|
| Aufsatznummer | 113454 |
| Fachzeitschrift | Sensors and Actuators A: Physical |
| Jahrgang | 338 |
| Frühes Online-Datum | 17 Feb. 2022 |
| Publikationsstatus | Veröffentlicht - 1 Mai 2022 |
Abstract
The electroplating technique is used to realize microtransformers on a SiO2 wafer. The magnetic core of these microtransformers is deposited at a substrate temperature of 5 °C and 21 °C, while the core material is the same. For the fabrication of the magnetic core (3 µm thick), Ni-Fe-W alloy film is utilized. These fabricated transformers show changes in performance due to variations in core properties. The transformers whose core is fabricated at substrate temperature 21 °C have a significantly higher inductance than the microtransformers whose core is fabricated at a substrate temperature of 5 °C. However, the core fabricated at 5 °C has better magnetic properties than the core fabricated at 21 °C. An impedance analyzer is employed for the characterization of transformers. A signal of 5 mA at 1 MHz is used to obtain the inductance of transformers. The maximum inductance of transformers in which cores are fabricated at 5 °C and 21 °C are 54 nH and 68 nH and almost continuous up to 30 MHz, respectively. A maximum quality factor of 3.51 is attained at 15 MHz.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Instrumentierung
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Werkstoffwissenschaften (insg.)
- Oberflächen, Beschichtungen und Folien
- Werkstoffwissenschaften (insg.)
- Metalle und Legierungen
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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in: Sensors and Actuators A: Physical, Jahrgang 338, 113454, 01.05.2022.
Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review
}
TY - JOUR
T1 - Characterization of Microtransformers with Magnetic Ni-Fe-W alloy Cores Plated at Two Different Substrate Temperatures
AU - Mundotiya, Brij Mohan
AU - Dinulovic, Dragan
AU - Rissing, Lutz
AU - Wurz, Marc Christopher
N1 - Funding Information: The authors acknowledge scanning electron microscopy facility available at the Materials Research Centre (MRC), Malaviya National Institute of Technology Jaipur, Jaipur-302017, India. This work is carried out with the support of Hannover School for Nanotechnology.
PY - 2022/5/1
Y1 - 2022/5/1
N2 - The electroplating technique is used to realize microtransformers on a SiO2 wafer. The magnetic core of these microtransformers is deposited at a substrate temperature of 5 °C and 21 °C, while the core material is the same. For the fabrication of the magnetic core (3 µm thick), Ni-Fe-W alloy film is utilized. These fabricated transformers show changes in performance due to variations in core properties. The transformers whose core is fabricated at substrate temperature 21 °C have a significantly higher inductance than the microtransformers whose core is fabricated at a substrate temperature of 5 °C. However, the core fabricated at 5 °C has better magnetic properties than the core fabricated at 21 °C. An impedance analyzer is employed for the characterization of transformers. A signal of 5 mA at 1 MHz is used to obtain the inductance of transformers. The maximum inductance of transformers in which cores are fabricated at 5 °C and 21 °C are 54 nH and 68 nH and almost continuous up to 30 MHz, respectively. A maximum quality factor of 3.51 is attained at 15 MHz.
AB - The electroplating technique is used to realize microtransformers on a SiO2 wafer. The magnetic core of these microtransformers is deposited at a substrate temperature of 5 °C and 21 °C, while the core material is the same. For the fabrication of the magnetic core (3 µm thick), Ni-Fe-W alloy film is utilized. These fabricated transformers show changes in performance due to variations in core properties. The transformers whose core is fabricated at substrate temperature 21 °C have a significantly higher inductance than the microtransformers whose core is fabricated at a substrate temperature of 5 °C. However, the core fabricated at 5 °C has better magnetic properties than the core fabricated at 21 °C. An impedance analyzer is employed for the characterization of transformers. A signal of 5 mA at 1 MHz is used to obtain the inductance of transformers. The maximum inductance of transformers in which cores are fabricated at 5 °C and 21 °C are 54 nH and 68 nH and almost continuous up to 30 MHz, respectively. A maximum quality factor of 3.51 is attained at 15 MHz.
KW - Electroplating technique
KW - Microtransformers
KW - Ni-Fe-W alloy core
KW - Substrate temperature
UR - http://www.scopus.com/inward/record.url?scp=85124942365&partnerID=8YFLogxK
U2 - 10.1016/j.sna.2022.113454
DO - 10.1016/j.sna.2022.113454
M3 - Article
AN - SCOPUS:85124942365
VL - 338
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
SN - 0924-4247
M1 - 113454
ER -