Details
| Original language | English |
|---|---|
| Article number | 2533 |
| Number of pages | 15 |
| Journal | Sensors |
| Volume | 21 |
| Issue number | 7 |
| Publication status | Published - 4 Apr 2021 |
Abstract
Keywords
- Co-resonance, Inertial balance, N/MEMS, Nano-mass detection, Nano/micro-electro-mechanical-system, Piezoelectric sensors, Resonance systems
ASJC Scopus subject areas
- Chemistry(all)
- Analytical Chemistry
- Computer Science(all)
- Information Systems
- Physics and Astronomy(all)
- Atomic and Molecular Physics, and Optics
- Biochemistry, Genetics and Molecular Biology(all)
- Biochemistry
- Physics and Astronomy(all)
- Instrumentation
- Engineering(all)
- Electrical and Electronic Engineering
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In: Sensors, Vol. 21, No. 7, 2533, 04.04.2021.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Towards a Highly Sensitive Piezoelectric Nano-Mass Detection
T2 - A Model-Based Concept Study
AU - Twiefel, Jens
AU - Glukhovskoy, Anatoly
AU - de Wall, Sascha
AU - Wurz, Marc Christopher
AU - Sehlmeyer, Merle
AU - Hitzemann, Moritz
AU - Zimmermann, Stefan
N1 - Funding Information: The publication of this article was funded by the Open Access fund of Leibniz Universität Hannover.
PY - 2021/4/4
Y1 - 2021/4/4
N2 - The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrication is addressed in this early concept phase. To simplify the setup, longitudinal and bending vibrations were combined for the first time. The direct integration of an aluminum nitride (AlN) piezoelectric element for simultaneous excitation and sensing further simplified the setup. The feasibility of this concept is shown by a model-based approach, and the underlying parameter dependencies are presented with an equivalent model. To include the geometrical and material aspects, a finite element model that supports the concept as a very promising approach for future nano-mass detectors is established.
AB - The detection of exceedingly small masses still presents a large challenge, and even though very high sensitivities have been archived, the fabrication of those setups is still difficult. In this paper, a novel approach for a co-resonant mass detector is theoretically presented, where simple fabrication is addressed in this early concept phase. To simplify the setup, longitudinal and bending vibrations were combined for the first time. The direct integration of an aluminum nitride (AlN) piezoelectric element for simultaneous excitation and sensing further simplified the setup. The feasibility of this concept is shown by a model-based approach, and the underlying parameter dependencies are presented with an equivalent model. To include the geometrical and material aspects, a finite element model that supports the concept as a very promising approach for future nano-mass detectors is established.
KW - Co-resonance
KW - Inertial balance
KW - N/MEMS
KW - Nano-mass detection
KW - Nano/micro-electro-mechanical-system
KW - Piezoelectric sensors
KW - Resonance systems
UR - http://www.scopus.com/inward/record.url?scp=85103486789&partnerID=8YFLogxK
U2 - 10.3390/s21072533
DO - 10.3390/s21072533
M3 - Article
C2 - 33916616
AN - SCOPUS:85103486789
VL - 21
JO - Sensors
JF - Sensors
SN - 1424-8220
IS - 7
M1 - 2533
ER -