Details
| Original language | English |
|---|---|
| Title of host publication | 2021 IEEE 71st Electronic Components and Technology Conference (ECTC) |
| Pages | 1563-1570 |
| Number of pages | 8 |
| ISBN (Electronic) | 978-1-6654-4097-4 |
| Publication status | Published - 2021 |
Publication series
| Name | Proceedings - Electronic Components and Technology Conference |
|---|---|
| Volume | 2021-June |
| ISSN (Print) | 0569-5503 |
Abstract
As an alternative to silicon membranes, a pressure sensor concept based on glass-membranes was developed, monolithically manufactured, and evaluated. Pt strain gauge structures of two geometries were fabricated on circular and square glass membranes, realized using the Laser Induced Deep Etching (LIDE) technology. The basal resistivity, the offset voltage, and pressure and temperature dependencies were measured. The designs exhibited linear behavior in the tested regimes and high sensitivity. A discussion of the results and classification regarding the use of glass as a substrate draws the conclusion that the LIDE technology is well suited to manufacture mechanically loaded, monolithic glass-based MEMS without process-related substrate damage.
Keywords
- Diaphragm, Differential pressure, Glass, LIDE, MEMS, Membrane, Micromachined, Strain gauge
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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2021 IEEE 71st Electronic Components and Technology Conference (ECTC). 2021. p. 1563-1570 (Proceedings - Electronic Components and Technology Conference; Vol. 2021-June).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Proof of Concept: Glass-Membrane Based Differential Pressure Sensor
AU - Glukhovskoy, Anatoly
AU - Prediger, Maren Susanne
AU - Schäfer, Jennifer
AU - Ambrosio, Antonio
AU - Ambrosius, Norbert
AU - Vogt, Aaron
AU - Santos, Rafael
AU - Ostholt, Roman
AU - Wurz, Marc
PY - 2021
Y1 - 2021
N2 - As an alternative to silicon membranes, a pressure sensor concept based on glass-membranes was developed, monolithically manufactured, and evaluated. Pt strain gauge structures of two geometries were fabricated on circular and square glass membranes, realized using the Laser Induced Deep Etching (LIDE) technology. The basal resistivity, the offset voltage, and pressure and temperature dependencies were measured. The designs exhibited linear behavior in the tested regimes and high sensitivity. A discussion of the results and classification regarding the use of glass as a substrate draws the conclusion that the LIDE technology is well suited to manufacture mechanically loaded, monolithic glass-based MEMS without process-related substrate damage.
AB - As an alternative to silicon membranes, a pressure sensor concept based on glass-membranes was developed, monolithically manufactured, and evaluated. Pt strain gauge structures of two geometries were fabricated on circular and square glass membranes, realized using the Laser Induced Deep Etching (LIDE) technology. The basal resistivity, the offset voltage, and pressure and temperature dependencies were measured. The designs exhibited linear behavior in the tested regimes and high sensitivity. A discussion of the results and classification regarding the use of glass as a substrate draws the conclusion that the LIDE technology is well suited to manufacture mechanically loaded, monolithic glass-based MEMS without process-related substrate damage.
KW - Diaphragm
KW - Differential pressure
KW - Glass
KW - LIDE
KW - MEMS
KW - Membrane
KW - Micromachined
KW - Strain gauge
UR - http://www.scopus.com/inward/record.url?scp=85124655871&partnerID=8YFLogxK
U2 - 10.1109/ectc32696.2021.00248
DO - 10.1109/ectc32696.2021.00248
M3 - Conference contribution
SN - 978-1-6654-3120-0
T3 - Proceedings - Electronic Components and Technology Conference
SP - 1563
EP - 1570
BT - 2021 IEEE 71st Electronic Components and Technology Conference (ECTC)
ER -