Details
| Original language | English |
|---|---|
| Pages | 160-162 |
| Number of pages | 3 |
| Volume | 56 |
| Issue number | 3 |
| Journal | Welding and Cutting |
| Publication status | Published - 2004 |
Abstract
The most important factors for the brazing of micromechanical components in MEMS technology (MEMS - micro-electro-mechanical systems) relace to exact positioning of the components, to appropriate surface conditioring, to the heating of a limited legion and to a true-to-contour design of the joints within narnow limits. For this purpose, there is a need for suitable jigs and brazing-filler metal application processes which, with regard to exact positioning and a brazing-filler metal quantity adjusted to the joining geometric;, take account of the microscopic dimensions of the compone its to be joined. The developed brazing jig is intended for the brazing and high-temperature brazing of micromechanical components and can be used for joining metal fibres with a diameter of 100 to: 300 μm as a butt joint. After the application of brazing filler metal to the components by means of ion plating using vacuum arc vaporisers (arc-PVD process), it was possible to successfully join the components fixed in the brazing jig by means of furnace orazing.
ASJC Scopus subject areas
- Engineering(all)
- Mechanics of Materials
- Engineering(all)
- Mechanical Engineering
- Materials Science(all)
- Metals and Alloys
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In: Welding and Cutting, Vol. 56, No. 3, 2004, p. 160-162.
Research output: Contribution to specialist publication › Contribution in non-scientific journal › Transfer
}
TY - GEN
T1 - Precisior brazing processes for MEMS technology
AU - Bach, Friedrich Wihelm
AU - Möhwald, Kai
AU - Holländer, Ulich
AU - Nakhosteen, C. Benjamin
PY - 2004
Y1 - 2004
N2 - The most important factors for the brazing of micromechanical components in MEMS technology (MEMS - micro-electro-mechanical systems) relace to exact positioning of the components, to appropriate surface conditioring, to the heating of a limited legion and to a true-to-contour design of the joints within narnow limits. For this purpose, there is a need for suitable jigs and brazing-filler metal application processes which, with regard to exact positioning and a brazing-filler metal quantity adjusted to the joining geometric;, take account of the microscopic dimensions of the compone its to be joined. The developed brazing jig is intended for the brazing and high-temperature brazing of micromechanical components and can be used for joining metal fibres with a diameter of 100 to: 300 μm as a butt joint. After the application of brazing filler metal to the components by means of ion plating using vacuum arc vaporisers (arc-PVD process), it was possible to successfully join the components fixed in the brazing jig by means of furnace orazing.
AB - The most important factors for the brazing of micromechanical components in MEMS technology (MEMS - micro-electro-mechanical systems) relace to exact positioning of the components, to appropriate surface conditioring, to the heating of a limited legion and to a true-to-contour design of the joints within narnow limits. For this purpose, there is a need for suitable jigs and brazing-filler metal application processes which, with regard to exact positioning and a brazing-filler metal quantity adjusted to the joining geometric;, take account of the microscopic dimensions of the compone its to be joined. The developed brazing jig is intended for the brazing and high-temperature brazing of micromechanical components and can be used for joining metal fibres with a diameter of 100 to: 300 μm as a butt joint. After the application of brazing filler metal to the components by means of ion plating using vacuum arc vaporisers (arc-PVD process), it was possible to successfully join the components fixed in the brazing jig by means of furnace orazing.
UR - http://www.scopus.com/inward/record.url?scp=3042641465&partnerID=8YFLogxK
M3 - Contribution in non-scientific journal
AN - SCOPUS:3042641465
VL - 56
SP - 160
EP - 162
JO - Welding and Cutting
JF - Welding and Cutting
SN - 1612-3433
ER -