Details
| Original language | English |
|---|---|
| Title of host publication | Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVIII |
| Editors | Christophe Moser, Eva Blasco, Debashis Chanda |
| Publisher | SPIE |
| ISBN (electronic) | 9781510685109 |
| Publication status | Published - 19 Mar 2025 |
| Event | Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVIII 2025 - San Francisco, United States Duration: 25 Jan 2025 → 31 Jan 2025 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 13381 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
This study investigates the improvement of planar waveguide performance for advanced optical sensors by optimized hot embossing on polymethylmethacrylate (PMMA) substrates with Ormocomp photoresist and integration of zeolite imidazole framework-8 (ZIF-8). We have produced planar waveguides with significantly reduced optical transmission losses of 2.32 dB/cm which is suited for the sensing application intended. The integration of ZIF-8-based optical films improves carbon dioxide (CO2) sensing, with adsorption taking ~19 seconds and desorption ~28 seconds, demonstrating excellent reversibility of gas adsorption/desorption cycles. Future research will investigate different photoresists to further optimize waveguide performance and expand application cases. This study may thus lay the foundation for the next optical sensing technologies in the biomedical, environmental, and industrial fields based on functionalized planar-optical waveguide arrays.
Keywords
- hot embossing, metal-organic framework, microfabrication, optical gas sensing, photoresists, planar polymer waveguides
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- BibTeX
- RIS
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVIII. ed. / Christophe Moser; Eva Blasco; Debashis Chanda. SPIE, 2025. 133810G (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 13381).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Highly precise thermal imprinting of microstructures for optical sensing application
AU - Bhatia, Yash
AU - Zheng, Lei
AU - Steinbach, Lukas
AU - Günther, Axel
AU - Schneider, Andreas
AU - Roth, Bernhard
N1 - Publisher Copyright: © 2025 SPIE.
PY - 2025/3/19
Y1 - 2025/3/19
N2 - This study investigates the improvement of planar waveguide performance for advanced optical sensors by optimized hot embossing on polymethylmethacrylate (PMMA) substrates with Ormocomp photoresist and integration of zeolite imidazole framework-8 (ZIF-8). We have produced planar waveguides with significantly reduced optical transmission losses of 2.32 dB/cm which is suited for the sensing application intended. The integration of ZIF-8-based optical films improves carbon dioxide (CO2) sensing, with adsorption taking ~19 seconds and desorption ~28 seconds, demonstrating excellent reversibility of gas adsorption/desorption cycles. Future research will investigate different photoresists to further optimize waveguide performance and expand application cases. This study may thus lay the foundation for the next optical sensing technologies in the biomedical, environmental, and industrial fields based on functionalized planar-optical waveguide arrays.
AB - This study investigates the improvement of planar waveguide performance for advanced optical sensors by optimized hot embossing on polymethylmethacrylate (PMMA) substrates with Ormocomp photoresist and integration of zeolite imidazole framework-8 (ZIF-8). We have produced planar waveguides with significantly reduced optical transmission losses of 2.32 dB/cm which is suited for the sensing application intended. The integration of ZIF-8-based optical films improves carbon dioxide (CO2) sensing, with adsorption taking ~19 seconds and desorption ~28 seconds, demonstrating excellent reversibility of gas adsorption/desorption cycles. Future research will investigate different photoresists to further optimize waveguide performance and expand application cases. This study may thus lay the foundation for the next optical sensing technologies in the biomedical, environmental, and industrial fields based on functionalized planar-optical waveguide arrays.
KW - hot embossing
KW - metal-organic framework
KW - microfabrication
KW - optical gas sensing
KW - photoresists
KW - planar polymer waveguides
UR - http://www.scopus.com/inward/record.url?scp=105002032471&partnerID=8YFLogxK
U2 - 10.1117/12.3043113
DO - 10.1117/12.3043113
M3 - Conference contribution
AN - SCOPUS:105002032471
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVIII
A2 - Moser, Christophe
A2 - Blasco, Eva
A2 - Chanda, Debashis
PB - SPIE
T2 - Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVIII 2025
Y2 - 25 January 2025 through 31 January 2025
ER -