Highly precise thermal imprinting of microstructures for optical sensing application

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OriginalspracheEnglisch
Titel des SammelwerksAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics XVIII
Herausgeber/-innenChristophe Moser, Eva Blasco, Debashis Chanda
Herausgeber (Verlag)SPIE
ISBN (elektronisch)9781510685109
PublikationsstatusVeröffentlicht - 19 März 2025
VeranstaltungAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics XVIII 2025 - San Francisco, USA / Vereinigte Staaten
Dauer: 25 Jan. 202531 Jan. 2025

Publikationsreihe

NameProceedings of SPIE - The International Society for Optical Engineering
Band13381
ISSN (Print)0277-786X
ISSN (elektronisch)1996-756X

Abstract

This study investigates the improvement of planar waveguide performance for advanced optical sensors by optimized hot embossing on polymethylmethacrylate (PMMA) substrates with Ormocomp photoresist and integration of zeolite imidazole framework-8 (ZIF-8). We have produced planar waveguides with significantly reduced optical transmission losses of 2.32 dB/cm which is suited for the sensing application intended. The integration of ZIF-8-based optical films improves carbon dioxide (CO2) sensing, with adsorption taking ~19 seconds and desorption ~28 seconds, demonstrating excellent reversibility of gas adsorption/desorption cycles. Future research will investigate different photoresists to further optimize waveguide performance and expand application cases. This study may thus lay the foundation for the next optical sensing technologies in the biomedical, environmental, and industrial fields based on functionalized planar-optical waveguide arrays.

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Highly precise thermal imprinting of microstructures for optical sensing application. / Bhatia, Yash; Zheng, Lei; Steinbach, Lukas et al.
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVIII. Hrsg. / Christophe Moser; Eva Blasco; Debashis Chanda. SPIE, 2025. 133810G (Proceedings of SPIE - The International Society for Optical Engineering; Band 13381).

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschungPeer-Review

Bhatia, Y, Zheng, L, Steinbach, L, Günther, A, Schneider, A & Roth, B 2025, Highly precise thermal imprinting of microstructures for optical sensing application. in C Moser, E Blasco & D Chanda (Hrsg.), Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVIII., 133810G, Proceedings of SPIE - The International Society for Optical Engineering, Bd. 13381, SPIE, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVIII 2025, San Francisco, California, USA / Vereinigte Staaten, 25 Jan. 2025. https://doi.org/10.1117/12.3043113
Bhatia, Y., Zheng, L., Steinbach, L., Günther, A., Schneider, A., & Roth, B. (2025). Highly precise thermal imprinting of microstructures for optical sensing application. In C. Moser, E. Blasco, & D. Chanda (Hrsg.), Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVIII Artikel 133810G (Proceedings of SPIE - The International Society for Optical Engineering; Band 13381). SPIE. https://doi.org/10.1117/12.3043113
Bhatia Y, Zheng L, Steinbach L, Günther A, Schneider A, Roth B. Highly precise thermal imprinting of microstructures for optical sensing application. in Moser C, Blasco E, Chanda D, Hrsg., Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVIII. SPIE. 2025. 133810G. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.3043113
Bhatia, Yash ; Zheng, Lei ; Steinbach, Lukas et al. / Highly precise thermal imprinting of microstructures for optical sensing application. Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVIII. Hrsg. / Christophe Moser ; Eva Blasco ; Debashis Chanda. SPIE, 2025. (Proceedings of SPIE - The International Society for Optical Engineering).
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abstract = "This study investigates the improvement of planar waveguide performance for advanced optical sensors by optimized hot embossing on polymethylmethacrylate (PMMA) substrates with Ormocomp photoresist and integration of zeolite imidazole framework-8 (ZIF-8). We have produced planar waveguides with significantly reduced optical transmission losses of 2.32 dB/cm which is suited for the sensing application intended. The integration of ZIF-8-based optical films improves carbon dioxide (CO2) sensing, with adsorption taking ~19 seconds and desorption ~28 seconds, demonstrating excellent reversibility of gas adsorption/desorption cycles. Future research will investigate different photoresists to further optimize waveguide performance and expand application cases. This study may thus lay the foundation for the next optical sensing technologies in the biomedical, environmental, and industrial fields based on functionalized planar-optical waveguide arrays.",
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AU - Bhatia, Yash

AU - Zheng, Lei

AU - Steinbach, Lukas

AU - Günther, Axel

AU - Schneider, Andreas

AU - Roth, Bernhard

N1 - Publisher Copyright: © 2025 SPIE.

PY - 2025/3/19

Y1 - 2025/3/19

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KW - metal-organic framework

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