Details
| Original language | English |
|---|---|
| Title of host publication | Digital Optical Technologies 2023 |
| Editors | Bernard C. Kress, Jurgen W. Czarske |
| Publisher | SPIE |
| ISBN (electronic) | 9781510664579 |
| Publication status | Published - 7 Aug 2023 |
| Event | SPIE Digital Optical Technologies - Munich, Germany Duration: 26 Jun 2023 → 30 Jun 2023 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 12624 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
Selective laser etching (SLE) enables highly precise 3-dimensional structuring of glasses with a resolution as low a few µm. Two main process steps are necessary for this technique. First, the previously created design is written inside the glass by using fs-laser radiation. Subsequently, the glass is placed in acid or a lye, to etch the laser-modified area. Hereby, the required substance for the post-processing step depends on the used glass. In our work, we investigated the structuring of fused silica with subsequent etching with KOH in detail. We studied the influence of different writing parameters such as laser power, repetition rate, polarization, stage movement speed and hatching distance towards an optimized surface roughness which is crucial for optical applications. The technology is not limited to the structuring of flat glass substrates, but applicable to fibers, waveguides or more complex 3D structures as well. Also hollow-core fibers have been processed to create an inlet and outlet for fluids and standard glass fibers were etched to realize free access to the fiber core, respectively. Especially the latter process enables a wide field of further applications if e.g. metal organic frameworks will be applied for sensing purposes or further optical structures printed on their surface by using two-photon polymerization processes.
Keywords
- glass fibers, optical manufacturing, optical sensing, selective laser etching, subtractive manufacturing
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
- Standard
- Harvard
- Apa
- Vancouver
- BibTeX
- RIS
Digital Optical Technologies 2023. ed. / Bernard C. Kress; Jurgen W. Czarske. SPIE, 2023. 126240B (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 12624).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Highly precise and flexible manufacturing of integrated optical structures in fused silica using selective laser etching
AU - Günther, A.
AU - Ramadas, S. C.B.
AU - Zheng, L.
AU - Kowalsky, W.
AU - Roth, B.
N1 - Funding Information: This work was funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under Germany’s Excellence Strategy within the Cluster of Excellence PhoenixD (EXC 2122, Project ID 390833453).
PY - 2023/8/7
Y1 - 2023/8/7
N2 - Selective laser etching (SLE) enables highly precise 3-dimensional structuring of glasses with a resolution as low a few µm. Two main process steps are necessary for this technique. First, the previously created design is written inside the glass by using fs-laser radiation. Subsequently, the glass is placed in acid or a lye, to etch the laser-modified area. Hereby, the required substance for the post-processing step depends on the used glass. In our work, we investigated the structuring of fused silica with subsequent etching with KOH in detail. We studied the influence of different writing parameters such as laser power, repetition rate, polarization, stage movement speed and hatching distance towards an optimized surface roughness which is crucial for optical applications. The technology is not limited to the structuring of flat glass substrates, but applicable to fibers, waveguides or more complex 3D structures as well. Also hollow-core fibers have been processed to create an inlet and outlet for fluids and standard glass fibers were etched to realize free access to the fiber core, respectively. Especially the latter process enables a wide field of further applications if e.g. metal organic frameworks will be applied for sensing purposes or further optical structures printed on their surface by using two-photon polymerization processes.
AB - Selective laser etching (SLE) enables highly precise 3-dimensional structuring of glasses with a resolution as low a few µm. Two main process steps are necessary for this technique. First, the previously created design is written inside the glass by using fs-laser radiation. Subsequently, the glass is placed in acid or a lye, to etch the laser-modified area. Hereby, the required substance for the post-processing step depends on the used glass. In our work, we investigated the structuring of fused silica with subsequent etching with KOH in detail. We studied the influence of different writing parameters such as laser power, repetition rate, polarization, stage movement speed and hatching distance towards an optimized surface roughness which is crucial for optical applications. The technology is not limited to the structuring of flat glass substrates, but applicable to fibers, waveguides or more complex 3D structures as well. Also hollow-core fibers have been processed to create an inlet and outlet for fluids and standard glass fibers were etched to realize free access to the fiber core, respectively. Especially the latter process enables a wide field of further applications if e.g. metal organic frameworks will be applied for sensing purposes or further optical structures printed on their surface by using two-photon polymerization processes.
KW - glass fibers
KW - optical manufacturing
KW - optical sensing
KW - selective laser etching
KW - subtractive manufacturing
UR - http://www.scopus.com/inward/record.url?scp=85173600789&partnerID=8YFLogxK
U2 - 10.1117/12.2675807
DO - 10.1117/12.2675807
M3 - Conference contribution
AN - SCOPUS:85173600789
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Digital Optical Technologies 2023
A2 - Kress, Bernard C.
A2 - Czarske, Jurgen W.
PB - SPIE
T2 - SPIE Digital Optical Technologies
Y2 - 26 June 2023 through 30 June 2023
ER -