Glass-Extraction Electrode for Field Emission Applications

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Details

Original languageEnglish
Title of host publication2024 37th International Vacuum Nanoelectronics Conference (IVNC)
ISBN (electronic)979-8-3503-7976-1
Publication statusPublished - 2024

Publication series

NameInternational Vacuum Nanoelectronics Conference proceedings
ISSN (Print)2164-2370
ISSN (electronic)2380-6311

Abstract

This work focuses on designing and fabricating an optimized extraction electrode made out of borofloat glass. The electrode is a part of an emitter chip, where the field emitters are manufactured by the wafer dicing technique. The extraction electrode was fabricated by Selective Laser Etch (SLE) process, where the geometry comprises an array of Through-Glass-Vias (TGV) that are positioned concentrically over each emitter tip, a cavity in the area of the TGVs, additional cavities for lowering of the electrode and TGVs for dowel pins for alignment. The current-voltage experiments confirm the enhancement in the measured field emission current dependent on the geometry of the extraction electrode.

Keywords

    FEA, SLE, dicing field emitters, glass extraction electrode, laser assisted bonding, silicon field emitters

ASJC Scopus subject areas

Cite this

Glass-Extraction Electrode for Field Emission Applications. / Buchta, Aleksandra M.; Kassner, Alexander; Dencker, Folke et al.
2024 37th International Vacuum Nanoelectronics Conference (IVNC). 2024. (International Vacuum Nanoelectronics Conference proceedings).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Buchta, AM, Kassner, A, Dencker, F & Wurz, MC 2024, Glass-Extraction Electrode for Field Emission Applications. in 2024 37th International Vacuum Nanoelectronics Conference (IVNC). International Vacuum Nanoelectronics Conference proceedings. https://doi.org/10.1109/ivnc63480.2024.10652278
Buchta, A. M., Kassner, A., Dencker, F., & Wurz, M. C. (2024). Glass-Extraction Electrode for Field Emission Applications. In 2024 37th International Vacuum Nanoelectronics Conference (IVNC) (International Vacuum Nanoelectronics Conference proceedings). https://doi.org/10.1109/ivnc63480.2024.10652278
Buchta AM, Kassner A, Dencker F, Wurz MC. Glass-Extraction Electrode for Field Emission Applications. In 2024 37th International Vacuum Nanoelectronics Conference (IVNC). 2024. (International Vacuum Nanoelectronics Conference proceedings). doi: 10.1109/ivnc63480.2024.10652278
Buchta, Aleksandra M. ; Kassner, Alexander ; Dencker, Folke et al. / Glass-Extraction Electrode for Field Emission Applications. 2024 37th International Vacuum Nanoelectronics Conference (IVNC). 2024. (International Vacuum Nanoelectronics Conference proceedings).
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AU - Dencker, Folke

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KW - laser assisted bonding

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