Details
| Originalsprache | Englisch |
|---|---|
| Seiten (von - bis) | 243-247 |
| Seitenumfang | 5 |
| Fachzeitschrift | European Physical Journal: Special Topics |
| Jahrgang | 158 |
| Ausgabenummer | 1 |
| Publikationsstatus | Veröffentlicht - Mai 2008 |
Abstract
To demonstrate the feasibility of combining thin-film fabrication techniques and discrete MSM stripes, a hybrid actuator system was designed. The actuator system consists of four thin-film stators and two discrete MSM stripes mounted in a row. For creating an actuator motion, one of the MSM stripes has to be excited by a pair of stators to cause variant switching. This results in an elongation plus a compression of the second stripe and vice versa. The technologies required for fabricating the thin-film stator are sputter deposition, PECVD, electroplating, etching, and photolithography. This paper describes the fabrication process for a thin-film stator used for the MSM micro actuator system. It also presents technology study results indicating the feasibility of the planned fabrication sequence.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Allgemeine Materialwissenschaften
- Physik und Astronomie (insg.)
- Allgemeine Physik und Astronomie
- Chemie (insg.)
- Physikalische und Theoretische Chemie
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in: European Physical Journal: Special Topics, Jahrgang 158, Nr. 1, 05.2008, S. 243-247.
Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review
}
TY - JOUR
T1 - Manufacturing technology for the fabrication a discrete actuator using a magnetic shape memory alloy
AU - Spasova, B.
AU - Wurz, M. C.
AU - Gatzen, H. H.
PY - 2008/5
Y1 - 2008/5
N2 - To demonstrate the feasibility of combining thin-film fabrication techniques and discrete MSM stripes, a hybrid actuator system was designed. The actuator system consists of four thin-film stators and two discrete MSM stripes mounted in a row. For creating an actuator motion, one of the MSM stripes has to be excited by a pair of stators to cause variant switching. This results in an elongation plus a compression of the second stripe and vice versa. The technologies required for fabricating the thin-film stator are sputter deposition, PECVD, electroplating, etching, and photolithography. This paper describes the fabrication process for a thin-film stator used for the MSM micro actuator system. It also presents technology study results indicating the feasibility of the planned fabrication sequence.
AB - To demonstrate the feasibility of combining thin-film fabrication techniques and discrete MSM stripes, a hybrid actuator system was designed. The actuator system consists of four thin-film stators and two discrete MSM stripes mounted in a row. For creating an actuator motion, one of the MSM stripes has to be excited by a pair of stators to cause variant switching. This results in an elongation plus a compression of the second stripe and vice versa. The technologies required for fabricating the thin-film stator are sputter deposition, PECVD, electroplating, etching, and photolithography. This paper describes the fabrication process for a thin-film stator used for the MSM micro actuator system. It also presents technology study results indicating the feasibility of the planned fabrication sequence.
UR - http://www.scopus.com/inward/record.url?scp=43049105047&partnerID=8YFLogxK
U2 - 10.1140/epjst/e2008-00682-2
DO - 10.1140/epjst/e2008-00682-2
M3 - Article
AN - SCOPUS:43049105047
VL - 158
SP - 243
EP - 247
JO - European Physical Journal: Special Topics
JF - European Physical Journal: Special Topics
SN - 1951-6355
IS - 1
ER -