Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | 2022 IEEE Sensors, SENSORS 2022 - Conference Proceedings |
| Herausgeber (Verlag) | Institute of Electrical and Electronics Engineers Inc. |
| ISBN (elektronisch) | 9781665484640 |
| Publikationsstatus | Veröffentlicht - 2022 |
| Veranstaltung | 2022 IEEE Sensors Conference, SENSORS 2022 - Dallas, USA / Vereinigte Staaten Dauer: 30 Okt. 2022 → 2 Nov. 2022 |
Publikationsreihe
| Name | Proceedings of IEEE Sensors |
|---|---|
| Band | 2022-October |
| ISSN (Print) | 1930-0395 |
| ISSN (elektronisch) | 2168-9229 |
Abstract
The sensory equipment of components of large production machines plays a major role for quality monitoring. In portal milling machines, conventional foil-based strain gauges can be applied manually on guide carriages in order to measure the process forces and torques in all directions. Here, an improvement regarding accuracy, positioning and automatability concerning the sensor application is aimed by directly deposited thin-film sensors. Therefore, this article shows and evaluates a method for trimming of sputtered resistive thin-film strain gauges during their vacuum plasma fabrication process. In this way, an adjustment of the output signal of a thin-film chromium Wheatstone full-bridge circuit to 0.02 mV/V is possible, assuring a proper functionality with low apparent strain values of 6 μm/m up to temperature values of 90 °C.
ASJC Scopus Sachgebiete
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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- BibTex
- RIS
2022 IEEE Sensors, SENSORS 2022 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2022. (Proceedings of IEEE Sensors; Band 2022-October).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - In Situ Resistance Trimming of Directly Deposited Thin-Film Strain Gauges
AU - Ottermann, Rico
AU - Zhang, Shuowen
AU - Denkena, Berend
AU - Klemme, Heinrich
AU - Kowalke, Dennis
AU - Korbacher, Michael
AU - Dencker, Folke
AU - Wurz, Marc Christopher
N1 - Funding Information: The authors thank the German Research Foundation (Deutsche Forschungsgemeinschaft – DFG) that funded this work within the research project “Force-sensitive Guide Systems Based on Directly Deposited Component-Specific Sensors”.
PY - 2022
Y1 - 2022
N2 - The sensory equipment of components of large production machines plays a major role for quality monitoring. In portal milling machines, conventional foil-based strain gauges can be applied manually on guide carriages in order to measure the process forces and torques in all directions. Here, an improvement regarding accuracy, positioning and automatability concerning the sensor application is aimed by directly deposited thin-film sensors. Therefore, this article shows and evaluates a method for trimming of sputtered resistive thin-film strain gauges during their vacuum plasma fabrication process. In this way, an adjustment of the output signal of a thin-film chromium Wheatstone full-bridge circuit to 0.02 mV/V is possible, assuring a proper functionality with low apparent strain values of 6 μm/m up to temperature values of 90 °C.
AB - The sensory equipment of components of large production machines plays a major role for quality monitoring. In portal milling machines, conventional foil-based strain gauges can be applied manually on guide carriages in order to measure the process forces and torques in all directions. Here, an improvement regarding accuracy, positioning and automatability concerning the sensor application is aimed by directly deposited thin-film sensors. Therefore, this article shows and evaluates a method for trimming of sputtered resistive thin-film strain gauges during their vacuum plasma fabrication process. In this way, an adjustment of the output signal of a thin-film chromium Wheatstone full-bridge circuit to 0.02 mV/V is possible, assuring a proper functionality with low apparent strain values of 6 μm/m up to temperature values of 90 °C.
KW - direct deposition
KW - guide carriage
KW - sensors
KW - strain gauge
KW - thin-film
KW - trimming
UR - http://www.scopus.com/inward/record.url?scp=85144034390&partnerID=8YFLogxK
U2 - 10.1109/SENSORS52175.2022.9967357
DO - 10.1109/SENSORS52175.2022.9967357
M3 - Conference contribution
AN - SCOPUS:85144034390
T3 - Proceedings of IEEE Sensors
BT - 2022 IEEE Sensors, SENSORS 2022 - Conference Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2022 IEEE Sensors Conference, SENSORS 2022
Y2 - 30 October 2022 through 2 November 2022
ER -