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Precisely controlled batch-fabrication of highly sensitive co-resonant cantilever sensors from silicon-nitride

Research output: Contribution to journal › Article › Research › peer review

Authors

  • Ioannis Lampouras
  • Mathias Holz
  • Steffen Strehle
  • Julia Körner

Research Organisations

External Research Organisations

  • Ilmenau University of Technology
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Projects

  1. Advancement of the co-resonant sensor principle towards sensor applications by theoretical and experimental studies of sensitivity, detectability and damping

    Körner, J. (Principal Investigator)

    1 Jan 2019 → 31 Mar 2023

    Project: Research