Loading [MathJax]/extensions/tex2jax.js

Precisely controlled batch-fabrication of highly sensitive co-resonant cantilever sensors from silicon-nitride

Research output: Contribution to journalArticleResearchpeer review

Authors

  • Ioannis Lampouras
  • Mathias Holz
  • Steffen Strehle
  • Julia Körner

External Research Organisations

  • Ilmenau University of Technology
Plum Print visual indicator of research metrics
  • Citations
    • Citation Indexes: 2
  • Captures
    • Readers: 2
see details
1 - 1 out of 1Page size: 20