Details
| Original language | English |
|---|---|
| Article number | 134 |
| Journal | Nanoscale research letters |
| Volume | 14 |
| Issue number | 1 |
| Early online date | 17 Apr 2019 |
| Publication status | E-pub ahead of print - 17 Apr 2019 |
Abstract
In this paper, approaches for the realization of high-resolution periodic structures with gap sizes at sub-100 nm scale by two-photon polymerization (2PP) are presented. The impact of laser intensity on the feature sizes and surface quality is investigated. The influence of different photosensitive materials on the structure formation is compared. Based on the elliptical geometry character of the voxel, the authors present an idea to realize high-resolution structures with feature sizes less than 100 nm by controlling the laser focus position with respect to the glass substrate. This investigation covers structures fabricated respectively in the plane along and perpendicular to the major axis of voxel. The authors also provide a useful approach to manage the fabrication of proposed periodic structure with a periodic distance of 200 nm and a gap size of 65 nm.
Keywords
- Nanofabrication, Periodic structures, Sub-100 nm, Two-photon polymerization
ASJC Scopus subject areas
- Materials Science(all)
- General Materials Science
- Physics and Astronomy(all)
- Condensed Matter Physics
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In: Nanoscale research letters, Vol. 14, No. 1, 134, 17.04.2019.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Nanofabrication of High-Resolution Periodic Structures with a Gap Size Below 100 nm by Two-Photon Polymerization
AU - Zheng, Lei
AU - Kurselis, Kestutis
AU - El-Tamer, Ayman
AU - Hinze, Ulf
AU - Reinhardt, Carsten
AU - Overmeyer, Ludger
AU - Chichkov, Boris
N1 - Funding information: The financial support from the Deutsche Forschungsgemeinschaft (DFG, RE3012/4-1 and RE3012/2-1) is greatly acknowledged.
PY - 2019/4/17
Y1 - 2019/4/17
N2 - In this paper, approaches for the realization of high-resolution periodic structures with gap sizes at sub-100 nm scale by two-photon polymerization (2PP) are presented. The impact of laser intensity on the feature sizes and surface quality is investigated. The influence of different photosensitive materials on the structure formation is compared. Based on the elliptical geometry character of the voxel, the authors present an idea to realize high-resolution structures with feature sizes less than 100 nm by controlling the laser focus position with respect to the glass substrate. This investigation covers structures fabricated respectively in the plane along and perpendicular to the major axis of voxel. The authors also provide a useful approach to manage the fabrication of proposed periodic structure with a periodic distance of 200 nm and a gap size of 65 nm.
AB - In this paper, approaches for the realization of high-resolution periodic structures with gap sizes at sub-100 nm scale by two-photon polymerization (2PP) are presented. The impact of laser intensity on the feature sizes and surface quality is investigated. The influence of different photosensitive materials on the structure formation is compared. Based on the elliptical geometry character of the voxel, the authors present an idea to realize high-resolution structures with feature sizes less than 100 nm by controlling the laser focus position with respect to the glass substrate. This investigation covers structures fabricated respectively in the plane along and perpendicular to the major axis of voxel. The authors also provide a useful approach to manage the fabrication of proposed periodic structure with a periodic distance of 200 nm and a gap size of 65 nm.
KW - Nanofabrication
KW - Periodic structures
KW - Sub-100 nm
KW - Two-photon polymerization
UR - http://www.scopus.com/inward/record.url?scp=85064575608&partnerID=8YFLogxK
U2 - 10.1186/s11671-019-2955-5
DO - 10.1186/s11671-019-2955-5
M3 - Article
C2 - 30997578
AN - SCOPUS:85064575608
VL - 14
JO - Nanoscale research letters
JF - Nanoscale research letters
SN - 1931-7573
IS - 1
M1 - 134
ER -