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Magnetron sputter deposition of Ta2O5-SiO2 quantized nanolaminates

Research output: Contribution to journal › Article › Research › peer review

Authors

  • S. Schwyn Thöny
  • M. Bärtschi
  • M. Batzer
  • M. Baselgia

Research Organisations

External Research Organisations

  • Evatec AG
  • RhySearch
  • Laser Zentrum Hannover e.V. (LZH)
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Projects

  1. PhoenixD: Cluster of Excellence 2122: Photonics, Optics, and Engineering – Innovation Across Disciplines

    Morgner, U. (Principal Investigator) & Overmeyer, L. (Co-Principal Investigator)

    1 Jan 2019 → 31 Dec 2025

    Project: Research