Details
| Original language | English |
|---|---|
| Title of host publication | Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems |
| Publisher | SPIE |
| ISBN (electronic) | 9781628416398 |
| Publication status | Published - 21 May 2015 |
| Event | Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems - Barcelona, Spain Duration: 4 May 2015 → 6 May 2015 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 9517 |
| ISSN (Print) | 0277-786X |
| ISSN (electronic) | 1996-756X |
Abstract
We investigated the impact of polymer substrates on the magnetic properties of soft magnetic thin films. Experiments were carried out to evaluate the performance of AMR (anisotropic magnetoresistive) sensors deposited on polymeric substrates and to give indications for the design of future sensors on flexible substrates. Sputtered permalloy (NiFe 81/19) was used as a soft magnetic thin film layer. As substrate materials, liquid polyimide precursors and DuPont Kapton® HN foil were examined. Surface roughness was determined for each substrate material. The dynamic of soft magnetic behavior of the permalloy thin films was observed in a homogenous alternating magnetic field. Resulting R-Hcurves were evaluated in regard to the magnitude of the magnetoresistive effect (ΔR / R0-ratio), as well as the resulting magnetic anisotropy of the tested samples. B-H-curves were obtained by means of a vibrating sample magnetometer (VSM).
Keywords
- Flexible substrates, Magnetoresistive devices, Permalloy, Polyimides
ASJC Scopus subject areas
- Materials Science(all)
- Electronic, Optical and Magnetic Materials
- Physics and Astronomy(all)
- Condensed Matter Physics
- Computer Science(all)
- Computer Science Applications
- Mathematics(all)
- Applied Mathematics
- Engineering(all)
- Electrical and Electronic Engineering
Cite this
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- BibTeX
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Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems. SPIE, 2015. 95171R (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9517).
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - Impact of different polyimide-based substrates on the soft magnetic properties of NiFe thin films
AU - Rittinger, Johannes
AU - Taptimthong, Piriya
AU - Jogschies, Lisa
AU - Wurz, Marc C.
AU - Rissing, Lutz
N1 - Publisher Copyright: © 2015 COPYRIGHT SPIE. Copyright: Copyright 2016 Elsevier B.V., All rights reserved.
PY - 2015/5/21
Y1 - 2015/5/21
N2 - We investigated the impact of polymer substrates on the magnetic properties of soft magnetic thin films. Experiments were carried out to evaluate the performance of AMR (anisotropic magnetoresistive) sensors deposited on polymeric substrates and to give indications for the design of future sensors on flexible substrates. Sputtered permalloy (NiFe 81/19) was used as a soft magnetic thin film layer. As substrate materials, liquid polyimide precursors and DuPont Kapton® HN foil were examined. Surface roughness was determined for each substrate material. The dynamic of soft magnetic behavior of the permalloy thin films was observed in a homogenous alternating magnetic field. Resulting R-Hcurves were evaluated in regard to the magnitude of the magnetoresistive effect (ΔR / R0-ratio), as well as the resulting magnetic anisotropy of the tested samples. B-H-curves were obtained by means of a vibrating sample magnetometer (VSM).
AB - We investigated the impact of polymer substrates on the magnetic properties of soft magnetic thin films. Experiments were carried out to evaluate the performance of AMR (anisotropic magnetoresistive) sensors deposited on polymeric substrates and to give indications for the design of future sensors on flexible substrates. Sputtered permalloy (NiFe 81/19) was used as a soft magnetic thin film layer. As substrate materials, liquid polyimide precursors and DuPont Kapton® HN foil were examined. Surface roughness was determined for each substrate material. The dynamic of soft magnetic behavior of the permalloy thin films was observed in a homogenous alternating magnetic field. Resulting R-Hcurves were evaluated in regard to the magnitude of the magnetoresistive effect (ΔR / R0-ratio), as well as the resulting magnetic anisotropy of the tested samples. B-H-curves were obtained by means of a vibrating sample magnetometer (VSM).
KW - Flexible substrates
KW - Magnetoresistive devices
KW - Permalloy
KW - Polyimides
UR - http://www.scopus.com/inward/record.url?scp=84954116571&partnerID=8YFLogxK
U2 - 10.1117/12.2178765
DO - 10.1117/12.2178765
M3 - Conference contribution
AN - SCOPUS:84954116571
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
PB - SPIE
T2 - Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
Y2 - 4 May 2015 through 6 May 2015
ER -