Combination of Additive and Thin-Film Technological Manufacturing for the Realization of a Pressure Sensor for Biomedical Applications

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Original languageEnglish
Title of host publicationMikroSystemTechnik Kongress 2021
Subtitle of host publicationMikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings
PublisherVDE Verlag GmbH
Pages578-581
Number of pages4
ISBN (Electronic)9783800756575
Publication statusPublished - 2021
EventMikroSystemTechnik Congress 2021: Microelectronics, Microsystems Engineering and their Applications - Innovative Products for Future-Oriented Markets - Stuttgart-Ludwigsburg, Germany
Duration: 8 Nov 202110 Nov 2021

Publication series

NameMikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings

Abstract

Sensor technology is becoming increasingly important in medical technology and various sensor principles are state of the art. In this work, sensor thin films with anisotropic magnetoresistive effect were deposited on different substrates and compared. Further, the thin films were combined with a magnetic elastomer on a plug system to be investigated for its suitability in biomedical applications, such as intracranial pressure measurement. The detection of a step-wise pressure change up to 4 bar was achieved, which is 66-fold higher than target value. The system requires additional adaption to the desired application. Higher pressure regimes than biomedical, however, may be covered with this technology.

ASJC Scopus subject areas

Cite this

Combination of Additive and Thin-Film Technological Manufacturing for the Realization of a Pressure Sensor for Biomedical Applications. / Prediger, Maren S.; Müller, Eileen; Bengsch, Sebastian et al.
MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings. VDE Verlag GmbH, 2021. p. 578-581 (MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings).

Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

Prediger, MS, Müller, E, Bengsch, S & Wurz, MC 2021, Combination of Additive and Thin-Film Technological Manufacturing for the Realization of a Pressure Sensor for Biomedical Applications. in MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings. MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings, VDE Verlag GmbH, pp. 578-581, MikroSystemTechnik Congress 2021, Stuttgart-Ludwigsburg, Germany, 8 Nov 2021. <https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9698370>
Prediger, M. S., Müller, E., Bengsch, S., & Wurz, M. C. (2021). Combination of Additive and Thin-Film Technological Manufacturing for the Realization of a Pressure Sensor for Biomedical Applications. In MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings (pp. 578-581). (MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings). VDE Verlag GmbH. https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9698370
Prediger MS, Müller E, Bengsch S, Wurz MC. Combination of Additive and Thin-Film Technological Manufacturing for the Realization of a Pressure Sensor for Biomedical Applications. In MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings. VDE Verlag GmbH. 2021. p. 578-581. (MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings).
Prediger, Maren S. ; Müller, Eileen ; Bengsch, Sebastian et al. / Combination of Additive and Thin-Film Technological Manufacturing for the Realization of a Pressure Sensor for Biomedical Applications. MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings. VDE Verlag GmbH, 2021. pp. 578-581 (MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings).
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