Details
| Originalsprache | Englisch |
|---|---|
| Aufsatznummer | 012188 |
| Fachzeitschrift | Journal of Physics: Conference Series |
| Jahrgang | 2103 |
| Ausgabenummer | 1 |
| Publikationsstatus | Veröffentlicht - 14 Dez. 2021 |
| Veranstaltung | International Conference PhysicA.SPb/2021 - Saint Petersburg, Russland Dauer: 18 Okt. 2021 → 22 Okt. 2021 |
Abstract
The technology of MEMS atomic cells containing rubidium or caesium vapors in an atmosphere of neon buffer gas has been developed. Two-chamber silicon cells containing an optical cavity, shallow filtration channels and a technical container for a solid-state alkali source have been implemented in a single-step process of anisotropic wet chemical etching. To prevent significant undercutting of the filtration channels during etching of the through silicon cavities, the shapes of the compensating elements at the convex corners of the silicon nitride mask have been calculated and the composition of the silicon etchant has been experimentally found. The sealing of the cells has been carried out by silicon-glass anodic bonding at a temperature of 250 оС. For this purpose the LK5 glass which has an increased ionic conductivity in comparison with the conventional glass Borofloat 33 was used. The best microfabricated cells allowed us to obtain estimates of the relative instability of the coherent population trapping resonance frequency at the level of 5·10-11 at 1 s.
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in: Journal of Physics: Conference Series, Jahrgang 2103, Nr. 1, 012188, 14.12.2021.
Publikation: Beitrag in Fachzeitschrift › Konferenzaufsatz in Fachzeitschrift › Forschung › Peer-Review
}
TY - JOUR
T1 - Microfabrication of Alkali Vapor MEMS Cells for chip-scale atomic clock
AU - Kazakin, A.
AU - Kleimanov, R.
AU - Komarevtsev, I.
AU - Kondrateva, A.
AU - Enns, Y.
AU - Shashkin, A.
AU - Glukhovskoy, A.
N1 - Funding Information: This work was carried out in Peter the Great St.Petersburg Polytechnic University and was supported by a grant of Russian Science Foundation (project № 20-19-00146).
PY - 2021/12/14
Y1 - 2021/12/14
N2 - The technology of MEMS atomic cells containing rubidium or caesium vapors in an atmosphere of neon buffer gas has been developed. Two-chamber silicon cells containing an optical cavity, shallow filtration channels and a technical container for a solid-state alkali source have been implemented in a single-step process of anisotropic wet chemical etching. To prevent significant undercutting of the filtration channels during etching of the through silicon cavities, the shapes of the compensating elements at the convex corners of the silicon nitride mask have been calculated and the composition of the silicon etchant has been experimentally found. The sealing of the cells has been carried out by silicon-glass anodic bonding at a temperature of 250 оС. For this purpose the LK5 glass which has an increased ionic conductivity in comparison with the conventional glass Borofloat 33 was used. The best microfabricated cells allowed us to obtain estimates of the relative instability of the coherent population trapping resonance frequency at the level of 5·10-11 at 1 s.
AB - The technology of MEMS atomic cells containing rubidium or caesium vapors in an atmosphere of neon buffer gas has been developed. Two-chamber silicon cells containing an optical cavity, shallow filtration channels and a technical container for a solid-state alkali source have been implemented in a single-step process of anisotropic wet chemical etching. To prevent significant undercutting of the filtration channels during etching of the through silicon cavities, the shapes of the compensating elements at the convex corners of the silicon nitride mask have been calculated and the composition of the silicon etchant has been experimentally found. The sealing of the cells has been carried out by silicon-glass anodic bonding at a temperature of 250 оС. For this purpose the LK5 glass which has an increased ionic conductivity in comparison with the conventional glass Borofloat 33 was used. The best microfabricated cells allowed us to obtain estimates of the relative instability of the coherent population trapping resonance frequency at the level of 5·10-11 at 1 s.
UR - http://www.scopus.com/inward/record.url?scp=85123487477&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/2103/1/012188
DO - 10.1088/1742-6596/2103/1/012188
M3 - Conference article
AN - SCOPUS:85123487477
VL - 2103
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012188
T2 - International Conference PhysicA.SPb/2021
Y2 - 18 October 2021 through 22 October 2021
ER -