Magnetron sputter deposition of Ta2O5-SiO2 quantized nanolaminates

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Autoren

  • S. Schwyn Thöny
  • M. Bärtschi
  • M. Batzer
  • M. Baselgia
  • S. Waldner
  • M. Steinecke
  • H. Badorreck
  • A. Wienke
  • M. Jupé

Organisationseinheiten

Externe Organisationen

  • Evatec AG
  • RhySearch
  • Laser Zentrum Hannover e.V. (LZH)
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Seiten (von - bis)15825-15835
Seitenumfang11
FachzeitschriftOptics express
Jahrgang31
Ausgabenummer10
PublikationsstatusVeröffentlicht - 26 Apr. 2023

Abstract

Quantized nanolaminates are a type of optical metamaterials, which were discovered only recently. Their feasibility was demonstrated by atomic layer deposition and ion beam sputtering so far. In this paper, we will report on the successful magnetron sputter deposition of quantized nanolaminates based on Ta2O5-SiO2. We will describe the deposition process, show results and material characterization of films deposited in a very wide parameter range. Furthermore, we will show how quantized nanolaminates deposited by magnetron sputtering were used in optical interference coatings such as antireflection and mirror coatings.

ASJC Scopus Sachgebiete

Zitieren

Magnetron sputter deposition of Ta2O5-SiO2 quantized nanolaminates. / Schwyn Thöny, S.; Bärtschi, M.; Batzer, M. et al.
in: Optics express, Jahrgang 31, Nr. 10, 26.04.2023, S. 15825-15835.

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Schwyn Thöny, S, Bärtschi, M, Batzer, M, Baselgia, M, Waldner, S, Steinecke, M, Badorreck, H, Wienke, A & Jupé, M 2023, 'Magnetron sputter deposition of Ta2O5-SiO2 quantized nanolaminates', Optics express, Jg. 31, Nr. 10, S. 15825-15835. https://doi.org/10.1364/OE.487892
Schwyn Thöny, S., Bärtschi, M., Batzer, M., Baselgia, M., Waldner, S., Steinecke, M., Badorreck, H., Wienke, A., & Jupé, M. (2023). Magnetron sputter deposition of Ta2O5-SiO2 quantized nanolaminates. Optics express, 31(10), 15825-15835. https://doi.org/10.1364/OE.487892
Schwyn Thöny S, Bärtschi M, Batzer M, Baselgia M, Waldner S, Steinecke M et al. Magnetron sputter deposition of Ta2O5-SiO2 quantized nanolaminates. Optics express. 2023 Apr 26;31(10):15825-15835. doi: 10.1364/OE.487892
Schwyn Thöny, S. ; Bärtschi, M. ; Batzer, M. et al. / Magnetron sputter deposition of Ta2O5-SiO2 quantized nanolaminates. in: Optics express. 2023 ; Jahrgang 31, Nr. 10. S. 15825-15835.
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title = "Magnetron sputter deposition of Ta2O5-SiO2 quantized nanolaminates",
abstract = "Quantized nanolaminates are a type of optical metamaterials, which were discovered only recently. Their feasibility was demonstrated by atomic layer deposition and ion beam sputtering so far. In this paper, we will report on the successful magnetron sputter deposition of quantized nanolaminates based on Ta2O5-SiO2. We will describe the deposition process, show results and material characterization of films deposited in a very wide parameter range. Furthermore, we will show how quantized nanolaminates deposited by magnetron sputtering were used in optical interference coatings such as antireflection and mirror coatings.",
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AU - Schwyn Thöny, S.

AU - Bärtschi, M.

AU - Batzer, M.

AU - Baselgia, M.

AU - Waldner, S.

AU - Steinecke, M.

AU - Badorreck, H.

AU - Wienke, A.

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