Details
| Originalsprache | Englisch |
|---|---|
| Aufsatznummer | e116 |
| Fachzeitschrift | Light: Science and Applications |
| Jahrgang | 2 |
| Publikationsstatus | Veröffentlicht - 6 Dez. 2013 |
| Extern publiziert | Ja |
Abstract
We developed a novel two-photon polymerization (2PP) configuration for fabrication of high-aspect three-dimensional (3D) structures, with an overall height larger than working distance of the microscope objective used for laser beam focusing into a photosensitive material. This method is based on a modified optical 2PP setup, where a microscope objective (100× high N.A.), immersion oil and cover glass can be moved together into the photosensitive material, resulting in an effective higher and wider objective working range (WOW-2PP). The proposed technique enables the fabrication of high-aspect structures with sub-micrometer process resolution. 3D structures with a height of 7mmare demonstrated, which could hardly be built with the conventional 2PP set-up due to refractive index mismatch and laser beam disturbances.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Atom- und Molekularphysik sowie Optik
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in: Light: Science and Applications, Jahrgang 2, e116, 06.12.2013.
Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review
}
TY - JOUR
T1 - High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)
AU - Obata, Kotaro
AU - El-Tamer, Ayman
AU - Koch, Lothar
AU - Hinze, Ulf
AU - Chichkov, Boris N.
N1 - Funding information: This work was supported by the Deutsche Forschungsgemeinschaft (German Research Foundation) Cluster of Excellence REBIRTH and EU/FP7 project Phocam. We thank E Fadeeva and J Koch for helpful technical discussions.
PY - 2013/12/6
Y1 - 2013/12/6
N2 - We developed a novel two-photon polymerization (2PP) configuration for fabrication of high-aspect three-dimensional (3D) structures, with an overall height larger than working distance of the microscope objective used for laser beam focusing into a photosensitive material. This method is based on a modified optical 2PP setup, where a microscope objective (100× high N.A.), immersion oil and cover glass can be moved together into the photosensitive material, resulting in an effective higher and wider objective working range (WOW-2PP). The proposed technique enables the fabrication of high-aspect structures with sub-micrometer process resolution. 3D structures with a height of 7mmare demonstrated, which could hardly be built with the conventional 2PP set-up due to refractive index mismatch and laser beam disturbances.
AB - We developed a novel two-photon polymerization (2PP) configuration for fabrication of high-aspect three-dimensional (3D) structures, with an overall height larger than working distance of the microscope objective used for laser beam focusing into a photosensitive material. This method is based on a modified optical 2PP setup, where a microscope objective (100× high N.A.), immersion oil and cover glass can be moved together into the photosensitive material, resulting in an effective higher and wider objective working range (WOW-2PP). The proposed technique enables the fabrication of high-aspect structures with sub-micrometer process resolution. 3D structures with a height of 7mmare demonstrated, which could hardly be built with the conventional 2PP set-up due to refractive index mismatch and laser beam disturbances.
KW - Femtosecond laser
KW - Large-scale structuring
KW - Laser material processing
KW - Photochemistry
KW - Two-photon polymerization
UR - http://www.scopus.com/inward/record.url?scp=84891816156&partnerID=8YFLogxK
U2 - 10.1038/lsa.2013.72
DO - 10.1038/lsa.2013.72
M3 - Article
AN - SCOPUS:84891816156
VL - 2
JO - Light: Science and Applications
JF - Light: Science and Applications
SN - 2047-7538
M1 - e116
ER -