Details
| Titel in Übersetzung | Development of multifunctional standards for optical 3D microscopy |
|---|---|
| Originalsprache | Deutsch |
| Seiten (von - bis) | 19-25 |
| Seitenumfang | 7 |
| Fachzeitschrift | Technisches Messen |
| Jahrgang | 73 |
| Ausgabenummer | 1 |
| Publikationsstatus | Veröffentlicht - 2006 |
Abstract
The need to characterise structured surfaces leads to an increasing usage of optical 3D microscopes in production metrology. In contrast to conventional tactile measurement systems for which suitable norms and test pieces exist the traceability of optically acquired measurement values is complicated. Due to the peculiarities of each system individual errors occur. These can only be characterised by developing and combining individual standards.
Schlagwörter
- 3D microscopy, Bad values, Calibration, Standards, Voids
ASJC Scopus Sachgebiete
- Physik und Astronomie (insg.)
- Instrumentierung
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
Zitieren
- Standard
- Harvard
- Apa
- Vancouver
- BibTex
- RIS
in: Technisches Messen, Jahrgang 73, Nr. 1, 2006, S. 19-25.
Publikation: Beitrag in Fachzeitschrift › Übersichtsarbeit › Forschung › Peer-Review
}
TY - JOUR
T1 - Entwicklung multifunktionaler Kalibriernormale für die optische 3D-Mikroskopie
AU - Gräper, Arne
AU - Kraft, Arne
AU - Seewig, Jörg
AU - Reithmeier, Eduard
PY - 2006
Y1 - 2006
N2 - The need to characterise structured surfaces leads to an increasing usage of optical 3D microscopes in production metrology. In contrast to conventional tactile measurement systems for which suitable norms and test pieces exist the traceability of optically acquired measurement values is complicated. Due to the peculiarities of each system individual errors occur. These can only be characterised by developing and combining individual standards.
AB - The need to characterise structured surfaces leads to an increasing usage of optical 3D microscopes in production metrology. In contrast to conventional tactile measurement systems for which suitable norms and test pieces exist the traceability of optically acquired measurement values is complicated. Due to the peculiarities of each system individual errors occur. These can only be characterised by developing and combining individual standards.
KW - 3D microscopy
KW - Bad values
KW - Calibration
KW - Standards
KW - Voids
UR - http://www.scopus.com/inward/record.url?scp=33746067904&partnerID=8YFLogxK
U2 - 10.1524/teme.2006.73.1.19
DO - 10.1524/teme.2006.73.1.19
M3 - Übersichtsarbeit
AN - SCOPUS:33746067904
VL - 73
SP - 19
EP - 25
JO - Technisches Messen
JF - Technisches Messen
SN - 0171-8096
IS - 1
ER -