Control of a Dual-Stage Positioning System Consisting of two Permanent Magnet Linear Motors for High-Precision Applications

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschungPeer-Review

Autoren

  • Franz Luckert
  • Kay Horst Dempewolf
  • Axel Mertens

Externe Organisationen

  • Wittenstein cyber motor GmbH
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Titel des Sammelwerks2023 14th International Symposium on Linear Drivers for Industry Applications (LDIA)
Herausgeber (Verlag)Institute of Electrical and Electronics Engineers Inc.
ISBN (elektronisch)9798350329612
ISBN (Print)9798350329629
PublikationsstatusVeröffentlicht - 2023
Veranstaltung14th International Symposium on Linear Drivers for Industry Applications, LDIA 2023 - Hannover, Deutschland
Dauer: 28 Juni 202330 Juni 2023

Abstract

Dual-stage actuators are used in applications with high requirements for positional accuracy. One of the most widespread types of these actuators uses voice coil motors for fine positioning. In this paper, a control strategy for a dual-stage actuator consisting of two permanent magnet linear motors is investigated. The control strategy is developed based on the mechanical model of dual-stage actuator and consists of a control concept as well as a decoupling algorithm of the two stages by means of a force feedforward control and a Luenberger Disturbance Observer. With this control strategy, the two stages can finally be decoupled from each other and the fine positioner can be linearized so that its control behavior is similar to that of a voice coil motor. With this setup, the position error of a permanent magnet linear motor can be improved significantly compared to a single-stage system also using a disturbance observer.

ASJC Scopus Sachgebiete

Zitieren

Control of a Dual-Stage Positioning System Consisting of two Permanent Magnet Linear Motors for High-Precision Applications. / Luckert, Franz; Dempewolf, Kay Horst; Mertens, Axel.
2023 14th International Symposium on Linear Drivers for Industry Applications (LDIA). Institute of Electrical and Electronics Engineers Inc., 2023.

Publikation: Beitrag in Buch/Bericht/Sammelwerk/KonferenzbandAufsatz in KonferenzbandForschungPeer-Review

Luckert, F, Dempewolf, KH & Mertens, A 2023, Control of a Dual-Stage Positioning System Consisting of two Permanent Magnet Linear Motors for High-Precision Applications. in 2023 14th International Symposium on Linear Drivers for Industry Applications (LDIA). Institute of Electrical and Electronics Engineers Inc., 14th International Symposium on Linear Drivers for Industry Applications, LDIA 2023, Hannover, Deutschland, 28 Juni 2023. https://doi.org/10.1109/LDIA59564.2023.10297456
Luckert, F., Dempewolf, K. H., & Mertens, A. (2023). Control of a Dual-Stage Positioning System Consisting of two Permanent Magnet Linear Motors for High-Precision Applications. In 2023 14th International Symposium on Linear Drivers for Industry Applications (LDIA) Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/LDIA59564.2023.10297456
Luckert F, Dempewolf KH, Mertens A. Control of a Dual-Stage Positioning System Consisting of two Permanent Magnet Linear Motors for High-Precision Applications. in 2023 14th International Symposium on Linear Drivers for Industry Applications (LDIA). Institute of Electrical and Electronics Engineers Inc. 2023 doi: 10.1109/LDIA59564.2023.10297456
Luckert, Franz ; Dempewolf, Kay Horst ; Mertens, Axel. / Control of a Dual-Stage Positioning System Consisting of two Permanent Magnet Linear Motors for High-Precision Applications. 2023 14th International Symposium on Linear Drivers for Industry Applications (LDIA). Institute of Electrical and Electronics Engineers Inc., 2023.
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@inproceedings{4a60d101e48c49058f91b36b64a80039,
title = "Control of a Dual-Stage Positioning System Consisting of two Permanent Magnet Linear Motors for High-Precision Applications",
abstract = "Dual-stage actuators are used in applications with high requirements for positional accuracy. One of the most widespread types of these actuators uses voice coil motors for fine positioning. In this paper, a control strategy for a dual-stage actuator consisting of two permanent magnet linear motors is investigated. The control strategy is developed based on the mechanical model of dual-stage actuator and consists of a control concept as well as a decoupling algorithm of the two stages by means of a force feedforward control and a Luenberger Disturbance Observer. With this control strategy, the two stages can finally be decoupled from each other and the fine positioner can be linearized so that its control behavior is similar to that of a voice coil motor. With this setup, the position error of a permanent magnet linear motor can be improved significantly compared to a single-stage system also using a disturbance observer.",
keywords = "dual-stage linear drive, high precision positioning, Luenberger disturbance observer, permanent magnet linear motor, robust control",
author = "Franz Luckert and Dempewolf, {Kay Horst} and Axel Mertens",
year = "2023",
doi = "10.1109/LDIA59564.2023.10297456",
language = "English",
isbn = "9798350329629",
booktitle = "2023 14th International Symposium on Linear Drivers for Industry Applications (LDIA)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
address = "United States",
note = "14th International Symposium on Linear Drivers for Industry Applications, LDIA 2023 ; Conference date: 28-06-2023 Through 30-06-2023",

}

Download

TY - GEN

T1 - Control of a Dual-Stage Positioning System Consisting of two Permanent Magnet Linear Motors for High-Precision Applications

AU - Luckert, Franz

AU - Dempewolf, Kay Horst

AU - Mertens, Axel

PY - 2023

Y1 - 2023

N2 - Dual-stage actuators are used in applications with high requirements for positional accuracy. One of the most widespread types of these actuators uses voice coil motors for fine positioning. In this paper, a control strategy for a dual-stage actuator consisting of two permanent magnet linear motors is investigated. The control strategy is developed based on the mechanical model of dual-stage actuator and consists of a control concept as well as a decoupling algorithm of the two stages by means of a force feedforward control and a Luenberger Disturbance Observer. With this control strategy, the two stages can finally be decoupled from each other and the fine positioner can be linearized so that its control behavior is similar to that of a voice coil motor. With this setup, the position error of a permanent magnet linear motor can be improved significantly compared to a single-stage system also using a disturbance observer.

AB - Dual-stage actuators are used in applications with high requirements for positional accuracy. One of the most widespread types of these actuators uses voice coil motors for fine positioning. In this paper, a control strategy for a dual-stage actuator consisting of two permanent magnet linear motors is investigated. The control strategy is developed based on the mechanical model of dual-stage actuator and consists of a control concept as well as a decoupling algorithm of the two stages by means of a force feedforward control and a Luenberger Disturbance Observer. With this control strategy, the two stages can finally be decoupled from each other and the fine positioner can be linearized so that its control behavior is similar to that of a voice coil motor. With this setup, the position error of a permanent magnet linear motor can be improved significantly compared to a single-stage system also using a disturbance observer.

KW - dual-stage linear drive

KW - high precision positioning

KW - Luenberger disturbance observer

KW - permanent magnet linear motor

KW - robust control

UR - http://www.scopus.com/inward/record.url?scp=85178056261&partnerID=8YFLogxK

U2 - 10.1109/LDIA59564.2023.10297456

DO - 10.1109/LDIA59564.2023.10297456

M3 - Conference contribution

AN - SCOPUS:85178056261

SN - 9798350329629

BT - 2023 14th International Symposium on Linear Drivers for Industry Applications (LDIA)

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 14th International Symposium on Linear Drivers for Industry Applications, LDIA 2023

Y2 - 28 June 2023 through 30 June 2023

ER -