Details
| Originalsprache | Englisch |
|---|---|
| Titel des Sammelwerks | Optical Fabrication, Testing, and Metrology II |
| Untertitel | 13 - 15 September 2005, Jena, Germany |
| Erscheinungsort | Bellingham |
| Herausgeber (Verlag) | SPIE |
| ISBN (Print) | 0-8194-5983-6 |
| Publikationsstatus | Veröffentlicht - 19 Okt. 2005 |
| Extern publiziert | Ja |
| Veranstaltung | Optical Fabrication, Testing, and Metrology II - Jena, Deutschland Dauer: 13 Sept. 2005 → 15 Sept. 2005 |
Publikationsreihe
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Herausgeber (Verlag) | SPIE |
| Band | 5965 |
| ISSN (Print) | 0277-786X |
Abstract
For precise angle resolved scatter (ARS) investigations on optical components, a scatterometer has been developed, which allows three dimensional scanning of the scattered radiation from the test specimen. By combining the set-up with different radiation sources, measurements in the spectral region from the DUV- to the NIR-spectral range can be performed. The optical properties of the components: reflection, transmittance, and the scatter behavior can be determined in the same run. The measured data are absolutely calibrated to the incident power. In this paper, we report about ARS-measurements on different samples such as holographic gratings, bare and anti reflective coated substrates. Additionally, results of scatter measurements on high reflective mirrors for 633nm with different numbers of layers will be presented. The comparison of the ARS-data and the results of Total Scattering (according to ISO 13696) on the same samples will be discussed.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Informatik (insg.)
- Angewandte Informatik
- Mathematik (insg.)
- Angewandte Mathematik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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Optical Fabrication, Testing, and Metrology II: 13 - 15 September 2005, Jena, Germany. Bellingham: SPIE, 2005. (Proceedings of SPIE - The International Society for Optical Engineering; Band 5965).
Publikation: Beitrag in Buch/Bericht/Sammelwerk/Konferenzband › Aufsatz in Konferenzband › Forschung › Peer-Review
}
TY - GEN
T1 - Angle resolved scatter measurements on optical components
AU - Kadkhoda, Puja
AU - Mädebach, Heinrich
AU - Ristau, Detlev
PY - 2005/10/19
Y1 - 2005/10/19
N2 - For precise angle resolved scatter (ARS) investigations on optical components, a scatterometer has been developed, which allows three dimensional scanning of the scattered radiation from the test specimen. By combining the set-up with different radiation sources, measurements in the spectral region from the DUV- to the NIR-spectral range can be performed. The optical properties of the components: reflection, transmittance, and the scatter behavior can be determined in the same run. The measured data are absolutely calibrated to the incident power. In this paper, we report about ARS-measurements on different samples such as holographic gratings, bare and anti reflective coated substrates. Additionally, results of scatter measurements on high reflective mirrors for 633nm with different numbers of layers will be presented. The comparison of the ARS-data and the results of Total Scattering (according to ISO 13696) on the same samples will be discussed.
AB - For precise angle resolved scatter (ARS) investigations on optical components, a scatterometer has been developed, which allows three dimensional scanning of the scattered radiation from the test specimen. By combining the set-up with different radiation sources, measurements in the spectral region from the DUV- to the NIR-spectral range can be performed. The optical properties of the components: reflection, transmittance, and the scatter behavior can be determined in the same run. The measured data are absolutely calibrated to the incident power. In this paper, we report about ARS-measurements on different samples such as holographic gratings, bare and anti reflective coated substrates. Additionally, results of scatter measurements on high reflective mirrors for 633nm with different numbers of layers will be presented. The comparison of the ARS-data and the results of Total Scattering (according to ISO 13696) on the same samples will be discussed.
KW - Angle resolved scattering (ARS)
KW - Binary Gratings
KW - ISO 13696
KW - Scatter Characteristic
UR - http://www.scopus.com/inward/record.url?scp=33244485040&partnerID=8YFLogxK
U2 - 10.1117/12.625398
DO - 10.1117/12.625398
M3 - Conference contribution
AN - SCOPUS:33244485040
SN - 0-8194-5983-6
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Optical Fabrication, Testing, and Metrology II
PB - SPIE
CY - Bellingham
T2 - Optical Fabrication, Testing, and Metrology II
Y2 - 13 September 2005 through 15 September 2005
ER -