Details
| Original language | English |
|---|---|
| Title of host publication | MikroSystemTechnik Kongress 2019 |
| Subtitle of host publication | Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings |
| Publisher | VDE Verlag GmbH |
| Pages | 506-509 |
| Number of pages | 4 |
| ISBN (electronic) | 9783800751297 |
| ISBN (print) | 9783800750900 |
| Publication status | Published - 2019 |
| Event | MikroSystemTechnik Congress 2019: Microelectronics, MEMS-MOEMS, System Integration - Pillars of Digitization and Artificial Intelligence - Berlin, Germany Duration: 28 Oct 2019 → 30 Oct 2019 |
Abstract
In this work will be introduced a concept of a thin-film reluctance microactuator. The actuator consists of the planar actuating coil and the bent thin-film ferromagnetic yoke. In the idle state, the in-plane yoke is bent out-of-the-plane due to the interaction of internal stresses of its layers. The planar coil creates the magnetic field and the soft ferromagnetic core together with the yoke redirects it toward the working gap of the actuator. The reluctance force unrolls the thin film yoke thus reducing the reluctance of the magnetic circuit of the actuator. Such an actuator may enable the creation of various micro-optomechanical-systems.
ASJC Scopus subject areas
- Computer Science(all)
- Hardware and Architecture
- Engineering(all)
- Electrical and Electronic Engineering
- Engineering(all)
- Control and Systems Engineering
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MikroSystemTechnik Kongress 2019: Mikroelektronik | MEMS-MOEMS | Systemintegration - Saulen der Digitalisierung und kunstlichen Intelligenz, Proceedings. VDE Verlag GmbH, 2019. p. 506-509.
Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
}
TY - GEN
T1 - The concept of a large working stroke reluctance zipper actuator
AU - Glukhovskoy, Anatoly
AU - Wurz, Marc Christopher
PY - 2019
Y1 - 2019
N2 - In this work will be introduced a concept of a thin-film reluctance microactuator. The actuator consists of the planar actuating coil and the bent thin-film ferromagnetic yoke. In the idle state, the in-plane yoke is bent out-of-the-plane due to the interaction of internal stresses of its layers. The planar coil creates the magnetic field and the soft ferromagnetic core together with the yoke redirects it toward the working gap of the actuator. The reluctance force unrolls the thin film yoke thus reducing the reluctance of the magnetic circuit of the actuator. Such an actuator may enable the creation of various micro-optomechanical-systems.
AB - In this work will be introduced a concept of a thin-film reluctance microactuator. The actuator consists of the planar actuating coil and the bent thin-film ferromagnetic yoke. In the idle state, the in-plane yoke is bent out-of-the-plane due to the interaction of internal stresses of its layers. The planar coil creates the magnetic field and the soft ferromagnetic core together with the yoke redirects it toward the working gap of the actuator. The reluctance force unrolls the thin film yoke thus reducing the reluctance of the magnetic circuit of the actuator. Such an actuator may enable the creation of various micro-optomechanical-systems.
UR - http://www.scopus.com/inward/record.url?scp=85096760477&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85096760477
SN - 9783800750900
SP - 506
EP - 509
BT - MikroSystemTechnik Kongress 2019
PB - VDE Verlag GmbH
T2 - MikroSystemTechnik Congress 2019
Y2 - 28 October 2019 through 30 October 2019
ER -