Details
| Original language | English |
|---|---|
| Pages (from-to) | 79-95 |
| Number of pages | 17 |
| Journal | Micron |
| Volume | 84 |
| Publication status | Published - 5 Mar 2016 |
Abstract
Confocal microscopy is widely used to measure the surface topography of specimen with a precision in the micrometer range. The measurement uncertainty and quality of the acquired data of confocal microscopy depends on various effects, such as optical aberrations, vibrations of the measurement setup and variations in the surface reflectivity. In this article, the influence of steep edges and undercuts on measurement results is examined. Steep edges on the specimen's surface lead to a reduced detector signal which influences the measurement accuracy and undercuts cause surface regions, which cannot be captured in a measurement. The article describes a method to overcome the negative effects of steep edges and undercuts by capturing several measurements of the surface with different angles between the surface and the optical axis of the objective. An algorithm is introduced which stitches different angle measurements together without knowledge of the exact position and orientation of the rotation axis. Thus, the measurement uncertainty due to steep edges and undercuts can be avoided without expensive high-precision rotation stages and time consuming adjustment of the measurement setup.
Keywords
- Confocal microscopy, Microstructured surfaces, Optical inspection, Point cloud registration and stitching
ASJC Scopus subject areas
- Biochemistry, Genetics and Molecular Biology(all)
- Structural Biology
- Materials Science(all)
- General Materials Science
- Physics and Astronomy(all)
- General Physics and Astronomy
- Biochemistry, Genetics and Molecular Biology(all)
- Cell Biology
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In: Micron, Vol. 84, 05.03.2016, p. 79-95.
Research output: Contribution to journal › Article › Research › peer review
}
TY - JOUR
T1 - Measurement of steep edges and undercuts in confocal microscopy
AU - Mueller, T.
AU - Jordan, M.
AU - Schneider, T.
AU - Poesch, A.
AU - Reithmeier, E.
PY - 2016/3/5
Y1 - 2016/3/5
N2 - Confocal microscopy is widely used to measure the surface topography of specimen with a precision in the micrometer range. The measurement uncertainty and quality of the acquired data of confocal microscopy depends on various effects, such as optical aberrations, vibrations of the measurement setup and variations in the surface reflectivity. In this article, the influence of steep edges and undercuts on measurement results is examined. Steep edges on the specimen's surface lead to a reduced detector signal which influences the measurement accuracy and undercuts cause surface regions, which cannot be captured in a measurement. The article describes a method to overcome the negative effects of steep edges and undercuts by capturing several measurements of the surface with different angles between the surface and the optical axis of the objective. An algorithm is introduced which stitches different angle measurements together without knowledge of the exact position and orientation of the rotation axis. Thus, the measurement uncertainty due to steep edges and undercuts can be avoided without expensive high-precision rotation stages and time consuming adjustment of the measurement setup.
AB - Confocal microscopy is widely used to measure the surface topography of specimen with a precision in the micrometer range. The measurement uncertainty and quality of the acquired data of confocal microscopy depends on various effects, such as optical aberrations, vibrations of the measurement setup and variations in the surface reflectivity. In this article, the influence of steep edges and undercuts on measurement results is examined. Steep edges on the specimen's surface lead to a reduced detector signal which influences the measurement accuracy and undercuts cause surface regions, which cannot be captured in a measurement. The article describes a method to overcome the negative effects of steep edges and undercuts by capturing several measurements of the surface with different angles between the surface and the optical axis of the objective. An algorithm is introduced which stitches different angle measurements together without knowledge of the exact position and orientation of the rotation axis. Thus, the measurement uncertainty due to steep edges and undercuts can be avoided without expensive high-precision rotation stages and time consuming adjustment of the measurement setup.
KW - Confocal microscopy
KW - Microstructured surfaces
KW - Optical inspection
KW - Point cloud registration and stitching
UR - http://www.scopus.com/inward/record.url?scp=84962548003&partnerID=8YFLogxK
U2 - 10.1016/j.micron.2016.03.001
DO - 10.1016/j.micron.2016.03.001
M3 - Article
C2 - 27011256
AN - SCOPUS:84962548003
VL - 84
SP - 79
EP - 95
JO - Micron
JF - Micron
SN - 0968-4328
ER -