Local rear contacts to silicon solar cells by in-line high-rate evaporation of aluminum

Research output: Contribution to journalArticleResearchpeer review

Authors

  • Christoph Mader
  • Jens Müller
  • Stefan Eidelloth
  • Rolf Brendel

Research Organisations

External Research Organisations

  • Institute for Solar Energy Research (ISFH)
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Details

Original languageEnglish
Pages (from-to)272-282
Number of pages11
JournalSolar Energy Materials and Solar Cells
Volume107
Early online date26 Jul 2012
Publication statusPublished - Dec 2012

Abstract

We contact p-type wafers and boron-diffused layers by laser ablation of a passivating aluminum oxide and silicon nitride stack and subsequent in-line high-rate evaporation of aluminum. We measure saturation current densities at the base contacts of 2.5×10 6-1.9×10 7 fA/cm 2 for base resistivities of 0.5-3.8 Ω cm and 491-905 fA/cm 2 for the contacts to boron-diffused layers of sheet resistances of 23-86 Ω/sq. The contact resistivity of Al layers to p-type silicon with surface doping densities of 4×10 15-3×10 19 cm -3 is in the range of 4-0.1 mΩ cm 2, respectively. The measured contact properties allow for the fabrication of highly efficient 'passivated emitter and rear cells' (PERC) and 'passivated emitter and rear totally diffused cells' (PERT). Numerical simulations show that evaporated rear contacts in combination with screen printed contacts at the front allow for energy conversion efficiencies of 20.6% and of 21.1%, for PERC and PERT cells, respectively. The simulated free energy losses show that such cells are not limited by the in-line evaporated point contacts on the rear side.

Keywords

    Contact recombination, Contact resistivity, In-line evaporation, Loss analysis, Rear contact, Silicon solar cell

ASJC Scopus subject areas

Sustainable Development Goals

Cite this

Local rear contacts to silicon solar cells by in-line high-rate evaporation of aluminum. / Mader, Christoph; Müller, Jens; Eidelloth, Stefan et al.
In: Solar Energy Materials and Solar Cells, Vol. 107, 12.2012, p. 272-282.

Research output: Contribution to journalArticleResearchpeer review

Mader C, Müller J, Eidelloth S, Brendel R. Local rear contacts to silicon solar cells by in-line high-rate evaporation of aluminum. Solar Energy Materials and Solar Cells. 2012 Dec;107:272-282. Epub 2012 Jul 26. doi: 10.1016/j.solmat.2012.06.047
Mader, Christoph ; Müller, Jens ; Eidelloth, Stefan et al. / Local rear contacts to silicon solar cells by in-line high-rate evaporation of aluminum. In: Solar Energy Materials and Solar Cells. 2012 ; Vol. 107. pp. 272-282.
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AU - Eidelloth, Stefan

AU - Brendel, Rolf

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