Equipment
3D-Druck von Glassubstraten, LightFab 3D Printer M mit IR-Laser 1030 nm
Stupp, J. (Head) & Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Polyimid-Ofen
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Schnellheizöfen (RTP/RTO/RTA)
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Widerstandsverdampfer "Congo Vac"
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Kathodenzerstäubungsanlage (Sputteranlage) Leybold Z590
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Elektronenstrahlverdampfer Balzers BAK 610
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Plasma CVD Oxford Plasmalab 90
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Horizontal-Clustersystem (Ofen)
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Ionenimplanter Varian VIISta HCS
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Reaktive Ionenätzanlage RIE (SF6 und CHF3)
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Rasterelektronenmikroskop mit e-Beam Lithografie
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Semitool Spin Rinser Dryer
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Nassbänke Reinigung und Strukturierung
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Mask-Aligner Süss MA 6
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Mask-Aligner Süss MA 150
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Lackschleuder mit Heizplatte Süss Labspin 6
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Lithografie, UV Kontakt und Proximity-Aligner Verbindungshalbleiter
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Plasma Asher TePla 100 und GIGAbatch 360M
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
HMDS-Hotplate Süss VP8 T/BM
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation
Spraycoater Süss AS8
Kerker, O. (Equipment management)
Laboratory of Nano and Quantum EngineeringFacility/Equipment: Research Instrumentation