Image/logo of the organisation entitled Laboratory of Nano and Quantum Engineering (LNQE)

Laboratory of Nano and Quantum Engineering (LNQE)

Organisational unit: Leibniz Research Centre

Type of address: Visitor address.
Schneiderberg 39
30167
Hannover
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Equipment

  1. Semitool Spin Rinser Dryer

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  2. Nassbänke Reinigung und Strukturierung

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  3. Mask-Aligner Süss MA 6

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  4. Mask-Aligner Süss MA 150

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  5. Lackschleuder mit Heizplatte Süss Labspin 6

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  6. Lithografie, UV Kontakt und Proximity-Aligner Verbindungshalbleiter

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  7. Plasma Asher TePla 100 und GIGAbatch 360M

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  8. HMDS-Hotplate Süss VP8 T/BM

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  9. Spraycoater Süss AS8

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  10. Lackschleuder mit Heizplatte Süss Delta 80, HP8TT

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  11. Lithografie, UV Kontakt und Proximity-Aligner Elementhalbleiter

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  12. Vertical furnace system

    Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  13. Laboratory of Nano and Quantum Engineering (LNQE)

    Schulze-Wischeler, F. (CEO) & Kerker, O. (Chief technical officer)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Building

  14. Electron beam lithography

    Ding, F. (Head) & Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Major Research Instrumentation

  15. Reactive ion etching

    Ding, F. (Head) & Kerker, O. (Manager)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Major Research Instrumentation

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