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Institute of Micro Production Technology

Organisational unit: Institute

Type of address: Visitor address.
An der Universität 2
30823
Garbsen
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101 - 120 out of 319Page size: 20

Publications

  1. 2021
  2. Published

    Modellierung und Herstellung eines akustischen Wandlers auf Waferniveau unter Einsatz von Polymermembranen

    Kaiser, M., 2021, Garbsen. 118 p.

    Research output: Thesis › Doctoral thesis

  3. Published

    Proof of Concept: Glass-Membrane Based Differential Pressure Sensor

    Glukhovskoy, A., Prediger, M. S., Schäfer, J., Ambrosio, A., Ambrosius, N., Vogt, A., Santos, R., Ostholt, R. & Wurz, M., 2021, 2021 IEEE 71st Electronic Components and Technology Conference (ECTC). p. 1563-1570 8 p. (Proceedings - Electronic Components and Technology Conference; vol. 2021-June).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  4. Published

    SiC-Mikrofräswerkzeuge für die Mikrobearbeitung

    Asadi, E., 2021, Garbsen. 114 p.

    Research output: Thesis › Doctoral thesis

  5. Published

    Simulationsgestützte Auslegung und Fertigung von piezoelektrischen Kraftsensor-Arrays zur Untersuchung des Ultraschall-Drahtbondprozesses

    Arndt, M., Wurz, M. C., Dencker, F., Long, Y. & Twiefel, J., 2021, MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings. VDE Verlag GmbH, p. 742-745 4 p. (MikroSystemTechnik Kongress 2021: Mikroelektronik, Mikrosystemtechnik und ihre Anwendungen - Innovative Produkte fur zukunftsfahige Markte, Proceedings).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  6. Published

    Technologieentwicklung zur Direktabscheidung und Strukturierung von Sensorik auf insbesondere Großbauteilen am Beispiel von Dehnungsmessstreifen

    Klaas, D., 2021, Garbsen. 156 p.

    Research output: Thesis › Doctoral thesis

  7. 2020
  8. Published

    VERFAHREN UND VORRICHTUNG ZUM BESTIMMEN EINER KONZENTRATION

    WURZ, Marc, C. (Inventor), Glukhovskoy, A. (Inventor), Schnebeck, T. (Inventor) & MAIER, Hans, J. (Inventor), 9 Dec 2020, IPC No. G01N 21/ 31 A I, Patent No. EP3746773, Priority date 30 Jan 2019, Priority No. WO2019EP52291

    Research output: Patent

  9. Published

    Verfahren zur Herstellung eines Formkörpers und Bauteil mit elektrischer Funktionalität

    Maier, H. J. (Inventor), Wurz, M. C. (Inventor) & Bengsch, S. (Inventor), 26 Nov 2020, IPC No. H05K 3/ 00 A I, Patent No. DE102019113973, Priority date 24 May 2019, Priority No. DE201910113973

    Research output: Patent

  10. Published

    Transfer Printing of Conductive Thin-Films on PDMS with Soluble Substrates for Flexible Biosensors

    Hadeler, S., Bengsch, S., Prediger, M. & Wurz, M., 14 Nov 2020, In: Engineering Proceedings. 2, 1, p. 8181

    Research output: Contribution to journal › Conference article › Research › peer review

  11. Published

    Verschleiß-Untersuchung in sauerstofffreier Atmosphäre

    Raumel, S., 7 Aug 2020, phi – Produktionstechnik Hannover informiert, 28.

    Research output: Contribution to specialist publication › Contribution in popular science journal › Transfer

  12. Published

    Development, characterisation and high-temperature suitability of thin-film strain gauges directly deposited with a new sputter coating system

    Klaas, D., Ottermann, R., Dencker, F. & Wurz, M. C., 10 Jun 2020, In: Sensors (Switzerland). 20, 11, p. 1-15 15 p., 3294.

    Research output: Contribution to journal › Article › Research › peer review

  13. Published

    Magnetkopf, Verfahren zur Speicherung von Information sowie Erzeugnis

    Rechel, M. (Inventor), Taptimthong, P. (Inventor) & Wurz, M. C. (Inventor), 16 Jan 2020, IPC No. G11B 5/ 235 A I, Patent No. DE102018116896, Priority date 12 Jul 2018, Priority No. DE201810116896

    Research output: Patent

  14. Published

    Einrichtung mit einem elektrischen Bauteil sowie Verfahren zu deren Herstellung

    Maier, H. J. (Inventor), Wurz, M. C. (Inventor), Bengsch, S. (Inventor), Giese, U. (Inventor) & Omelan, M. (Inventor), 9 Jan 2020, IPC No. B60C 23/ 04 A I, Patent No. DE102018116182, Priority date 4 Jul 2018, Priority No. DE201810116182

    Research output: Patent

  15. Published

    Direct Deposition of Thin-Film Strain Gauges with a New Coating System for Elevated Temperatures

    Ottermann, R., Klaas, D., Dencker, F., Wurz, M. C., Hoheisel, D., Rottengatter, P. & Kruspe, T., 2020, IEEE Sensors, SENSORS 2020: Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 9278661

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  16. Published

    Flexibel und druckempfindlich: Sensoren für die Insertionsüberwachung in der Cochlea

    Prediger, M. & Wurz, M. C., 2020, Hannover

    Research output: Other contribution › Other publication › Research › peer review

  17. Published

    Giant Magneto-Resistive Effect based Sensor on Laser Direct Structured MID Substrates

    Fischer, E. C., Bengsch, S., De Wall, S. & Wurz, M. C., 2020, Proceedings: IEEE 70th Electronic Components and Technology Conference, ECTC 2020. Institute of Electrical and Electronics Engineers Inc., p. 439-444 6 p. 9159426. (Proceedings - Electronic Components and Technology Conference; vol. 2020-June).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  18. Published

    Heat-Assisted Magnetic Storage on Component Surfaces

    Taptimthong, P., 2020, Garbsen. 135 p.

    Research output: Thesis › Doctoral thesis

  19. Published

    Mikrotechnologische Fertigung von integrierten optischen Gittern für den Einsatz in Atominterferometern

    de Wall, S., Kassner, A., Dencker, F., Künzler, C., Heine, H., Herr, W., Christ, M., Krutzik, M., Rasel, E. M. & Wurz, M. C., 2020, GMM-Fb. 97: Mikro-Nano-Integration. Berlin: VDE Verlag GmbH, p. 56-59 4 p. (GMM-Fachberichte).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  20. Published

    Novel Piezoelectric Force Sensor Array for Investigation of Ultrasonic Wire Bonding

    Arndt, M., Long, Y., Dencker, F., Reimann, J., Twiefel, J. & Wurz, M. C., 2020, Proceedings: IEEE 70th Electronic Components and Technology Conference, ECTC 2020. Institute of Electrical and Electronics Engineers Inc., p. 276-283 8 p. 9159495. (Proceedings - Electronic Components and Technology Conference; vol. 2020-June).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  21. Published

    Optical Platform for Highly Precise Optical Components

    Bengsch, S., Fischer, E., De Wall, S., Schelm, T., Arndt, M. & Wurz, M. C., 2020, Proceedings: IEEE 70th Electronic Components and Technology Conference, ECTC 2020. Institute of Electrical and Electronics Engineers Inc., p. 2191-2196 6 p. 9159477. (Proceedings - Electronic Components and Technology Conference; vol. 2020-June).

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

  22. Published

    Passive and Active Thermal Management of Bonded Bare-Dice Laser Diodes on Polymer Foil Substrates

    Bengsch, S. & Wurz, M. C., 2020, 2020 IEEE Photonics Conference, IPC 2020. Institute of Electrical and Electronics Engineers Inc., 9252383

    Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review

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