Publications
- 2017
- Published
Präzisionsbearbeitung bearbeitbarer Festkeramiken im ungebrannten Zustand durch Trennschleifen
Stompe, M., 2017, Garbsen.Research output: Thesis › Doctoral thesis
- Published
Press hardening tool integrated thin film temperature sensor
Dencker, F., Schlenkrich, A. & Wurz, M. C., 2017, Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. p. 349-350 2 p. (Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Pulsed electron source for atmospheric pressure chemical ionization in ion mobility spectrometry
Bunert, E., Heptner, A., Kirk, A. T., Käbein, O., Zimmermann, S., Kusch, A. & Wurz, M. C., 2017, 2017 30th International Vacuum Nanoelectronics Conference (IVNC). Langer, C. & Lawrowski, R. (eds.). Institute of Electrical and Electronics Engineers Inc., p. 102-103 2 p. 8051563. (International Vacuum Nanoelectronics Conference).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Reaktives Ionentiefenätzen von Schattenmasken für die Sensordirektabscheidung mit einer neuartigen Beschichtungsanlage
Klaas, D., Pehrs, F. & Wurz, M. C., 2017, MikroSystemTechnik Kongress 2017: Proceedings. Berlin: VDE Verlag GmbH, p. 680-683 4 p.Research output: Chapter in book/report/conference proceeding › Conference contribution › Research
- Published
Silicon field emitter arrays produced via wafer dicing
Kusch, A., Wurz, M., Bunert, E. & Zimmermann, S., 2017, 2017 30th International Vacuum Nanoelectronics Conference (IVNC). Langer, C. & Lawrowski, R. (eds.). Institute of Electrical and Electronics Engineers Inc., p. 132-133 2 p. 8051577. (International Vacuum Nanoelectronics Conference).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Technical inheritance: Information basis for the identification and development of product generations
Mozgova, I., Barton, S., Demminger, C., Miebach, T., Taptimthong, P., Lachmayer, R., Nyhuis, P., Reimche, W. & Wurz, M. C., 2017, In: Proceedings of the International Conference on Engineering Design, ICED. 6, DS87-6, p. 91-100 10 p.Research output: Contribution to journal › Conference article › Research › peer review
- 2016
- Published
Comparison of ALD and IBS Al2O3 films for high power lasers
Liu, H., Jensen, L., Becker, J., Wurz, M. C., Ma, P. & Ristau, D., 6 Dec 2016, 48th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials 2016. SPIE, 1001421. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10014).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Longitudinal conductivity of LaF3/SrF2 multilayer heterostructures
Vergentev, T., Banshchikov, A., Filimonov, A., Koroleva, E., Sokolov, N. & Wurz, M. C., 25 Nov 2016, In: Science and Technology of Advanced Materials. 17, 1, p. 799-806 8 p.Research output: Contribution to journal › Article › Research › peer review
- Published
Packaging for systems in harsh environments
Wurz, M. C. & Bengsch, S., 25 Nov 2016, Semiconductor Devices in Harsh Conditions. p. 135-147 13 p.Research output: Chapter in book/report/conference proceeding › Contribution to book/anthology › Research › peer review
- Published
Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers
Klaas, D., Rein, M., Wurz, M. & Rissing, L., 1 Oct 2016, In: Procedia Technology. 26, p. 27-34Research output: Contribution to journal › Conference article › Research
- Published
Flexible Magnetic Reading/Writing System: Heat-assisted Magnetic Recording
Taptimthong, P., Düsing, J. F., Rissing, L. & Wurz, M. C., 1 Oct 2016, In: Procedia Technology. 26, p. 72-78Research output: Contribution to journal › Conference article › Research
- Published
Stress Reduction in Sputtered Thin NiFe 81/19 Layers for Magnetic Field Sensors
Jogschies, L., Rittinger, J., Klaas, D. & Wurz, M., 1 Oct 2016, In: Procedia Technology. 26, p. 162-168Research output: Contribution to journal › Conference article › Research
- Published
Intracochlear Stimulation of the Basilar Membrane
van Drunen, W. J., Hofmann, V., Twiefel, J., Glukhovskoy, A., Beringer, S., Wurz, M. C., Rau, T. S., Wallaschek, J., Rissing, L., Lenarz, T. & Majdani, O., 28 Sept 2016, In: Biomedizinische Technik. 61, s1, p. 179-199 21 p.Research output: Contribution to journal › Article › Research › peer review
- Published
Direct hot embossing of microelements by means of photostructurable polyimide
Akin, M., Rezem, M., Rahlves, M., Cromwell, K., Roth, B., Reithmeier, E., Wurz, M. C., Rissing, L. & Maier, H. J., 23 Aug 2016, In: Journal of Micro/ Nanolithography, MEMS, and MOEMS. 15, 3, 034506.Research output: Contribution to journal › Article › Research › peer review
- Published
Effect of Substrate Temperature on Magnetic Properties of Electroplated 82Ni-15Fe-3W Alloy Films
Mundotiya, B. M., Rissing, L. & Wurz, M. C., Aug 2016, In: IEEE Transactions on Magnetics. 52, 8, 7448397.Research output: Contribution to journal › Article › Research › peer review
- Published
Magnetic microstructure analysis of sputter deposited permalloy thin films on a spin-on polyimide substrate
Rittinger, J., Taptimthong, P., Jogschies, L., Wurz, M. C. & Rissing, L., Jul 2016, In: Microsystem Technologies. 22, 7, p. 1627-1632 6 p.Research output: Contribution to journal › Article › Research › peer review
- Published
Manufacturing of micro end mills by batch processing of silicon carbide
Denkena, B., Wurz, M., Grove, T., Bouabid, A. & Asadi, E., 1 Jun 2016, Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016. Bointon, P., Leach, R. & Southon, N. (eds.). (Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Normal force actuator for a tactile display using a micromechanically built spring element made of Polyimide
Wurz, M., Rechel, M., Twiefel, J. & Hofmann, V., 1 Jun 2016, ACTUATOR 2016. 4 p.Research output: Chapter in book/report/conference proceeding › Conference contribution › Research
- Published
An application report: Protective thin film layers for high temperature sensor technology
Dencker, F., Wurz, M., Dubrovskiy, S. & Koroleva, E., 5 Apr 2016, Proceedings of the 2016 IEEE North West Russia Section Young Researchers in Electrical and Electronic Engineering Conference, EIConRusNW 2016. Shaposhnikov, S. (ed.). Institute of Electrical and Electronics Engineers Inc., p. 32-36 5 p. 7448110Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review
- Published
Transmission laser bonding of low melting eutectic alloys
Hoff, C., Cromwell, K., Hermsdorf, J., Akin, M., Wurz, M. C., Kaierle, S., Maier, H. J. & Overmeyer, L., 24 Mar 2016, High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications V. Kaierle, S. & Dorsch, F. (eds.). SPIE, 97410K. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9741).Research output: Chapter in book/report/conference proceeding › Conference contribution › Research › peer review