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Institute of Micro Production Technology

Organisational unit: Institute

Type of address: Visitor address.
An der Universität 2
30823
Garbsen
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Publications

  1. 2017
  2. Published

    Präzisionsbearbeitung bearbeitbarer Festkeramiken im ungebrannten Zustand durch Trennschleifen

    Stompe, M., 2017, Garbsen.

    Research output: ThesisDoctoral thesis

  3. Published

    Press hardening tool integrated thin film temperature sensor

    Dencker, F., Schlenkrich, A. & Wurz, M. C., 2017, Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017. p. 349-350 2 p. (Proceedings of the 17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  4. Published

    Pulsed electron source for atmospheric pressure chemical ionization in ion mobility spectrometry

    Bunert, E., Heptner, A., Kirk, A. T., Käbein, O., Zimmermann, S., Kusch, A. & Wurz, M. C., 2017, 2017 30th International Vacuum Nanoelectronics Conference (IVNC). Langer, C. & Lawrowski, R. (eds.). Institute of Electrical and Electronics Engineers Inc., p. 102-103 2 p. 8051563. (International Vacuum Nanoelectronics Conference).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  5. Published

    Reaktives Ionentiefenätzen von Schattenmasken für die Sensordirektabscheidung mit einer neuartigen Beschichtungsanlage

    Klaas, D., Pehrs, F. & Wurz, M. C., 2017, MikroSystemTechnik Kongress 2017: Proceedings. Berlin: VDE Verlag GmbH, p. 680-683 4 p.

    Research output: Chapter in book/report/conference proceedingConference contributionResearch

  6. Published

    Silicon field emitter arrays produced via wafer dicing

    Kusch, A., Wurz, M., Bunert, E. & Zimmermann, S., 2017, 2017 30th International Vacuum Nanoelectronics Conference (IVNC). Langer, C. & Lawrowski, R. (eds.). Institute of Electrical and Electronics Engineers Inc., p. 132-133 2 p. 8051577. (International Vacuum Nanoelectronics Conference).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  7. Published

    Technical inheritance: Information basis for the identification and development of product generations

    Mozgova, I., Barton, S., Demminger, C., Miebach, T., Taptimthong, P., Lachmayer, R., Nyhuis, P., Reimche, W. & Wurz, M. C., 2017, In: Proceedings of the International Conference on Engineering Design, ICED. 6, DS87-6, p. 91-100 10 p.

    Research output: Contribution to journalConference articleResearchpeer review

  8. 2016
  9. Published

    Comparison of ALD and IBS Al2O3 films for high power lasers

    Liu, H., Jensen, L., Becker, J., Wurz, M. C., Ma, P. & Ristau, D., 6 Dec 2016, 48th Annual Laser Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials 2016. SPIE, 1001421. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10014).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  10. Published

    Longitudinal conductivity of LaF3/SrF2 multilayer heterostructures

    Vergentev, T., Banshchikov, A., Filimonov, A., Koroleva, E., Sokolov, N. & Wurz, M. C., 25 Nov 2016, In: Science and Technology of Advanced Materials. 17, 1, p. 799-806 8 p.

    Research output: Contribution to journalArticleResearchpeer review

  11. Published

    Packaging for systems in harsh environments

    Wurz, M. C. & Bengsch, S., 25 Nov 2016, Semiconductor Devices in Harsh Conditions. p. 135-147 13 p.

    Research output: Chapter in book/report/conference proceedingContribution to book/anthologyResearchpeer review

  12. Published

    Development of a Humidity Sensor Element Based on Sputter-deposited thin ZnO-Layers

    Klaas, D., Rein, M., Wurz, M. & Rissing, L., 1 Oct 2016, In: Procedia Technology. 26, p. 27-34

    Research output: Contribution to journalConference articleResearch

  13. Published

    Flexible Magnetic Reading/Writing System: Heat-assisted Magnetic Recording

    Taptimthong, P., Düsing, J. F., Rissing, L. & Wurz, M. C., 1 Oct 2016, In: Procedia Technology. 26, p. 72-78

    Research output: Contribution to journalConference articleResearch

  14. Published

    Stress Reduction in Sputtered Thin NiFe 81/19 Layers for Magnetic Field Sensors

    Jogschies, L., Rittinger, J., Klaas, D. & Wurz, M., 1 Oct 2016, In: Procedia Technology. 26, p. 162-168

    Research output: Contribution to journalConference articleResearch

  15. Published

    Intracochlear Stimulation of the Basilar Membrane

    van Drunen, W. J., Hofmann, V., Twiefel, J., Glukhovskoy, A., Beringer, S., Wurz, M. C., Rau, T. S., Wallaschek, J., Rissing, L., Lenarz, T. & Majdani, O., 28 Sept 2016, In: Biomedizinische Technik. 61, s1, p. 179-199 21 p.

    Research output: Contribution to journalArticleResearchpeer review

  16. Published

    Direct hot embossing of microelements by means of photostructurable polyimide

    Akin, M., Rezem, M., Rahlves, M., Cromwell, K., Roth, B., Reithmeier, E., Wurz, M. C., Rissing, L. & Maier, H. J., 23 Aug 2016, In: Journal of Micro/ Nanolithography, MEMS, and MOEMS. 15, 3, 034506.

    Research output: Contribution to journalArticleResearchpeer review

  17. Published

    Effect of Substrate Temperature on Magnetic Properties of Electroplated 82Ni-15Fe-3W Alloy Films

    Mundotiya, B. M., Rissing, L. & Wurz, M. C., Aug 2016, In: IEEE Transactions on Magnetics. 52, 8, 7448397.

    Research output: Contribution to journalArticleResearchpeer review

  18. Published

    Magnetic microstructure analysis of sputter deposited permalloy thin films on a spin-on polyimide substrate

    Rittinger, J., Taptimthong, P., Jogschies, L., Wurz, M. C. & Rissing, L., Jul 2016, In: Microsystem Technologies. 22, 7, p. 1627-1632 6 p.

    Research output: Contribution to journalArticleResearchpeer review

  19. Published

    Manufacturing of micro end mills by batch processing of silicon carbide

    Denkena, B., Wurz, M., Grove, T., Bouabid, A. & Asadi, E., 1 Jun 2016, Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016. Bointon, P., Leach, R. & Southon, N. (eds.). (Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  20. Published

    Normal force actuator for a tactile display using a micromechanically built spring element made of Polyimide

    Wurz, M., Rechel, M., Twiefel, J. & Hofmann, V., 1 Jun 2016, ACTUATOR 2016. 4 p.

    Research output: Chapter in book/report/conference proceedingConference contributionResearch

  21. Published

    An application report: Protective thin film layers for high temperature sensor technology

    Dencker, F., Wurz, M., Dubrovskiy, S. & Koroleva, E., 5 Apr 2016, Proceedings of the 2016 IEEE North West Russia Section Young Researchers in Electrical and Electronic Engineering Conference, EIConRusNW 2016. Shaposhnikov, S. (ed.). Institute of Electrical and Electronics Engineers Inc., p. 32-36 5 p. 7448110

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

  22. Published

    Transmission laser bonding of low melting eutectic alloys

    Hoff, C., Cromwell, K., Hermsdorf, J., Akin, M., Wurz, M. C., Kaierle, S., Maier, H. J. & Overmeyer, L., 24 Mar 2016, High-Power Laser Materials Processing: Lasers, Beam Delivery, Diagnostics, and Applications V. Kaierle, S. & Dorsch, F. (eds.). SPIE, 97410K. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 9741).

    Research output: Chapter in book/report/conference proceedingConference contributionResearchpeer review

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