1. Plasma CVD Oxford Plasmalab 90

    Kerker, O. (Equipment management)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  2. Horizontal-Clustersystem (Ofen)

    Kerker, O. (Equipment management)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  3. Ionenimplanter Varian VIISta HCS

    Kerker, O. (Equipment management)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  4. Reaktive Ionenätzanlage RIE (SF6 und CHF3)

    Kerker, O. (Equipment management)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  5. Rasterelektronenmikroskop mit e-Beam Lithografie

    Kerker, O. (Equipment management)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  6. Semitool Spin Rinser Dryer

    Kerker, O. (Equipment management)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  7. Nassbänke Reinigung und Strukturierung

    Kerker, O. (Equipment management)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  8. Mask-Aligner Süss MA 6

    Kerker, O. (Equipment management)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  9. Mask-Aligner Süss MA 150

    Kerker, O. (Equipment management)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  10. Lackschleuder mit Heizplatte Süss Labspin 6

    Kerker, O. (Equipment management)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  11. Plasma Asher TePla 100 und GIGAbatch 360M

    Kerker, O. (Equipment management)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  12. HMDS-Hotplate Süss VP8 T/BM

    Kerker, O. (Equipment management)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  13. Spraycoater Süss AS8

    Kerker, O. (Equipment management)

    Laboratory of Nano and Quantum Engineering

    Facility/Equipment: Research Instrumentation

  14. DC power supply

    Ponick, B. (Head)

    Institute of Drive Systems and Power Electronics

    Facility/Equipment: Major Research Instrumentation