Details
| Originalsprache | Englisch |
|---|---|
| Aufsatznummer | 39356 |
| Fachzeitschrift | Scientific reports |
| Jahrgang | 15 |
| Ausgabenummer | 1 |
| Publikationsstatus | Veröffentlicht - 10 Nov. 2025 |
Abstract
Selective laser etching (SLE) is a procedure to create customized micro-fluidic or micro-mechanical structures in glass. We aim to utilize SLE for optics production as well and report on detailed investigations of the glass structuring process by variation of stage speed, laser power, polarization and repetition rate of the laser to reduce the surface roughness to optical quality without any additional process steps. We show that a surface roughness of 30 nm can be achieved which is sufficient to fabricate optical components or integrated optical structures even for the visible wavelength range. Our results enable the fabrication of free standing micro-structures with a feature size of less than 1 µm in fused silica using SLE and KOH as etchant which enables the fabrication of optical gratings.
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in: Scientific reports, Jahrgang 15, Nr. 1, 39356, 10.11.2025.
Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review
}
TY - JOUR
T1 - Surface structuring of glass with submicrometer features using selective laser etching
AU - Günther, Axel
AU - Wang, Xiaowei
AU - Kowalsky, Wolfgang
AU - Roth, Bernhard
N1 - Publisher Copyright: © The Author(s) 2025.
PY - 2025/11/10
Y1 - 2025/11/10
N2 - Selective laser etching (SLE) is a procedure to create customized micro-fluidic or micro-mechanical structures in glass. We aim to utilize SLE for optics production as well and report on detailed investigations of the glass structuring process by variation of stage speed, laser power, polarization and repetition rate of the laser to reduce the surface roughness to optical quality without any additional process steps. We show that a surface roughness of 30 nm can be achieved which is sufficient to fabricate optical components or integrated optical structures even for the visible wavelength range. Our results enable the fabrication of free standing micro-structures with a feature size of less than 1 µm in fused silica using SLE and KOH as etchant which enables the fabrication of optical gratings.
AB - Selective laser etching (SLE) is a procedure to create customized micro-fluidic or micro-mechanical structures in glass. We aim to utilize SLE for optics production as well and report on detailed investigations of the glass structuring process by variation of stage speed, laser power, polarization and repetition rate of the laser to reduce the surface roughness to optical quality without any additional process steps. We show that a surface roughness of 30 nm can be achieved which is sufficient to fabricate optical components or integrated optical structures even for the visible wavelength range. Our results enable the fabrication of free standing micro-structures with a feature size of less than 1 µm in fused silica using SLE and KOH as etchant which enables the fabrication of optical gratings.
KW - Integrated optics
KW - Optical waveguides
KW - Selective laser etching
UR - http://www.scopus.com/inward/record.url?scp=105021290104&partnerID=8YFLogxK
U2 - 10.1038/s41598-025-27241-0
DO - 10.1038/s41598-025-27241-0
M3 - Article
C2 - 41214094
AN - SCOPUS:105021290104
VL - 15
JO - Scientific reports
JF - Scientific reports
SN - 2045-2322
IS - 1
M1 - 39356
ER -