Process control of plasma polymerization in a large industrial reactor

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Autoren

  • P. Špatenka
  • H. J. Endres
  • J. Krumeich
  • R. W. Cook

Externe Organisationen

  • University of South Bohemia
  • BUCK‐Werke GmbH & Co
Forschungs-netzwerk anzeigen

Details

OriginalspracheEnglisch
Seiten (von - bis)1228-1232
Seitenumfang5
FachzeitschriftSurface and Coatings Technology
Jahrgang116-119
PublikationsstatusVeröffentlicht - Sept. 1999
Extern publiziertJa

Abstract

Application of the triple-probe method for volume-resolved monitoring of electron density and electron temperature during industrial-scale polymerization plasma process was tested. As a model process, simultaneous deposition of barrier film on the inner wall of six bottles using an asymmetrical r.f. discharge was investigated. The reproducibility of the process was better than 94%. The plasma density differed between particular bottles up to a factor of 2, and this difference increased with pressure. The barrier properties of the film increased with the product of the ion current and square root of the electron temperature

ASJC Scopus Sachgebiete

Zitieren

Process control of plasma polymerization in a large industrial reactor. / Špatenka, P.; Endres, H. J.; Krumeich, J. et al.
in: Surface and Coatings Technology, Jahrgang 116-119, 09.1999, S. 1228-1232.

Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review

Špatenka P, Endres HJ, Krumeich J, Cook RW. Process control of plasma polymerization in a large industrial reactor. Surface and Coatings Technology. 1999 Sep;116-119:1228-1232. doi: 10.1016/S0257-8972(99)00189-9
Špatenka, P. ; Endres, H. J. ; Krumeich, J. et al. / Process control of plasma polymerization in a large industrial reactor. in: Surface and Coatings Technology. 1999 ; Jahrgang 116-119. S. 1228-1232.
Download
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T1 - Process control of plasma polymerization in a large industrial reactor

AU - Špatenka, P.

AU - Endres, H. J.

AU - Krumeich, J.

AU - Cook, R. W.

N1 - Funding Information: This work was partly supported by the grant of the Grant Agency of the Czech Republic No. 202/98/0116.

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KW - Triple-probe method

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JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

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