Details
| Originalsprache | Englisch |
|---|---|
| Aufsatznummer | e202500483 |
| Fachzeitschrift | Solar RRL |
| Jahrgang | 9 |
| Ausgabenummer | 22 |
| Publikationsstatus | Veröffentlicht - 24 Nov. 2025 |
Abstract
In this work we present an optimized process for the photolithographic fabrication of inverted pyramid photonic crystals (PC) with 3.1 µm periodicity on Si(001)-substrates to improve the light trapping in single junction solar cells. Anisotropic alkaline etch was used to form the pyramids with (111)-sidewalls using partial surface masking with lithographically structured SiO2. Ridge widths between the pyramids down to (150 ± 50) nm were achieved, while ensuring a yield of multiple (2 × 2) cm2 areas per wafer sample. After deposition of an antireflection stack consisting of AlOx, SiNy, and SiOz with different thickness optimizations a weighted reflection approaching that of a random pyramid reference sample could be shown. We demonstrate a path length enhancement of 25 at a wavelength of 1200 nm for our cell with PCs. This is en par with but not superior to the respective value for the reference sample with random pyramids, and still below the Lambertian limit. Furthermore, we present the first POLO2-IBC (interdigitated back contact) solar cells with such photonic crystals on the front sides. These solar cells feature a power conversion efficiency of 22.9%.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Atom- und Molekularphysik sowie Optik
- Energie (insg.)
- Energieanlagenbau und Kraftwerkstechnik
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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in: Solar RRL, Jahrgang 9, Nr. 22, e202500483, 24.11.2025.
Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review
}
TY - JOUR
T1 - Optimization of Photolithographic Fabrication of Photonic Crystals and their Use in High Efficiency Solar Cells
AU - Salomon, Leon
AU - Rienäcker, Michael
AU - Larionova, Yevgeniya
AU - Haller, Alexej
AU - Spätlich, Sarah
AU - Peibst, Robby
AU - Krügener, Jan
N1 - Publisher Copyright: © 2025 The Author(s). Solar RRL published by Wiley-VCH GmbH.
PY - 2025/11/24
Y1 - 2025/11/24
N2 - In this work we present an optimized process for the photolithographic fabrication of inverted pyramid photonic crystals (PC) with 3.1 µm periodicity on Si(001)-substrates to improve the light trapping in single junction solar cells. Anisotropic alkaline etch was used to form the pyramids with (111)-sidewalls using partial surface masking with lithographically structured SiO2. Ridge widths between the pyramids down to (150 ± 50) nm were achieved, while ensuring a yield of multiple (2 × 2) cm2 areas per wafer sample. After deposition of an antireflection stack consisting of AlOx, SiNy, and SiOz with different thickness optimizations a weighted reflection approaching that of a random pyramid reference sample could be shown. We demonstrate a path length enhancement of 25 at a wavelength of 1200 nm for our cell with PCs. This is en par with but not superior to the respective value for the reference sample with random pyramids, and still below the Lambertian limit. Furthermore, we present the first POLO2-IBC (interdigitated back contact) solar cells with such photonic crystals on the front sides. These solar cells feature a power conversion efficiency of 22.9%.
AB - In this work we present an optimized process for the photolithographic fabrication of inverted pyramid photonic crystals (PC) with 3.1 µm periodicity on Si(001)-substrates to improve the light trapping in single junction solar cells. Anisotropic alkaline etch was used to form the pyramids with (111)-sidewalls using partial surface masking with lithographically structured SiO2. Ridge widths between the pyramids down to (150 ± 50) nm were achieved, while ensuring a yield of multiple (2 × 2) cm2 areas per wafer sample. After deposition of an antireflection stack consisting of AlOx, SiNy, and SiOz with different thickness optimizations a weighted reflection approaching that of a random pyramid reference sample could be shown. We demonstrate a path length enhancement of 25 at a wavelength of 1200 nm for our cell with PCs. This is en par with but not superior to the respective value for the reference sample with random pyramids, and still below the Lambertian limit. Furthermore, we present the first POLO2-IBC (interdigitated back contact) solar cells with such photonic crystals on the front sides. These solar cells feature a power conversion efficiency of 22.9%.
KW - interdigitated back contact solar cells
KW - inverted pyramids
KW - photolithography
KW - photonic crystals
UR - http://www.scopus.com/inward/record.url?scp=105017405206&partnerID=8YFLogxK
U2 - 10.1002/solr.202500483
DO - 10.1002/solr.202500483
M3 - Article
AN - SCOPUS:105017405206
VL - 9
JO - Solar RRL
JF - Solar RRL
SN - 2367-198X
IS - 22
M1 - e202500483
ER -