Details
| Originalsprache | Englisch |
|---|---|
| Aufsatznummer | 116224 |
| Seitenumfang | 12 |
| Fachzeitschrift | Sensors and Actuators A: Physical |
| Jahrgang | 383 |
| Frühes Online-Datum | 22 Jan. 2025 |
| Publikationsstatus | Veröffentlicht - 1 März 2025 |
Abstract
Near-field acoustic levitation (NFAL) offers many advantages over traditional non-contact methods, particularly in the fields of microelectromechanical systems and semiconductor processing. However, its application is limited by small levitation heights where maintaining a stable microscale gas film presents challenges. To address this issue, this paper investigates enhancing the load-carrying capacity (LCC) of NFAL systems through dual-frequency ultrasound (DFUS) technology. We first introduce the basic principles of NFAL, and theoretical modal based on the Reynolds equation, followed by a numerical solution using the Finite Difference Method (FDM). A multimodal coupled piezoelectric transducer operating in dual frequencies is proposed. Frequency compensation is achieved by altering the electrical boundaries of passive piezoelectric ceramics, overcoming the resonance frequency drift problem during high-power operation, and stable DFUS is generated. Experimental results demonstrate the impact of the second harmonic phase on levitation heights, revealing that optimized phase adjustments can significantly influence levitation height, with the optimal phase around 280°. With a radius of the acoustic radiation surface of 5 mm, and a gravitational load of 0.909 N, the results indicate that when a fundamental vibration with an amplitude of 3 μm is superimposed with a second harmonic of the same amplitude, DFUS at the optimal phase enhances levitation performance compared to single-frequency ultrasound (SFUS), with the increment rate of the levitation height reaching up to 78.5 % in the experiments. This study confirms the feasibility of DFUS for improving the performance of NFAL systems and lays the groundwork for future applications of dual-frequency ultrasound levitation.
ASJC Scopus Sachgebiete
- Werkstoffwissenschaften (insg.)
- Elektronische, optische und magnetische Materialien
- Physik und Astronomie (insg.)
- Instrumentierung
- Physik und Astronomie (insg.)
- Physik der kondensierten Materie
- Werkstoffwissenschaften (insg.)
- Oberflächen, Beschichtungen und Folien
- Werkstoffwissenschaften (insg.)
- Metalle und Legierungen
- Ingenieurwesen (insg.)
- Elektrotechnik und Elektronik
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in: Sensors and Actuators A: Physical, Jahrgang 383, 116224, 01.03.2025.
Publikation: Beitrag in Fachzeitschrift › Artikel › Forschung › Peer-Review
}
TY - JOUR
T1 - Near-field acoustic levitation generated by dual-frequency ultrasound
AU - Wang, Fangyi
AU - Wang, Liang
AU - Twiefel, Jens
AU - Morita, Takeshi
N1 - Publisher Copyright: © 2025 The Authors
PY - 2025/3/1
Y1 - 2025/3/1
N2 - Near-field acoustic levitation (NFAL) offers many advantages over traditional non-contact methods, particularly in the fields of microelectromechanical systems and semiconductor processing. However, its application is limited by small levitation heights where maintaining a stable microscale gas film presents challenges. To address this issue, this paper investigates enhancing the load-carrying capacity (LCC) of NFAL systems through dual-frequency ultrasound (DFUS) technology. We first introduce the basic principles of NFAL, and theoretical modal based on the Reynolds equation, followed by a numerical solution using the Finite Difference Method (FDM). A multimodal coupled piezoelectric transducer operating in dual frequencies is proposed. Frequency compensation is achieved by altering the electrical boundaries of passive piezoelectric ceramics, overcoming the resonance frequency drift problem during high-power operation, and stable DFUS is generated. Experimental results demonstrate the impact of the second harmonic phase on levitation heights, revealing that optimized phase adjustments can significantly influence levitation height, with the optimal phase around 280°. With a radius of the acoustic radiation surface of 5 mm, and a gravitational load of 0.909 N, the results indicate that when a fundamental vibration with an amplitude of 3 μm is superimposed with a second harmonic of the same amplitude, DFUS at the optimal phase enhances levitation performance compared to single-frequency ultrasound (SFUS), with the increment rate of the levitation height reaching up to 78.5 % in the experiments. This study confirms the feasibility of DFUS for improving the performance of NFAL systems and lays the groundwork for future applications of dual-frequency ultrasound levitation.
AB - Near-field acoustic levitation (NFAL) offers many advantages over traditional non-contact methods, particularly in the fields of microelectromechanical systems and semiconductor processing. However, its application is limited by small levitation heights where maintaining a stable microscale gas film presents challenges. To address this issue, this paper investigates enhancing the load-carrying capacity (LCC) of NFAL systems through dual-frequency ultrasound (DFUS) technology. We first introduce the basic principles of NFAL, and theoretical modal based on the Reynolds equation, followed by a numerical solution using the Finite Difference Method (FDM). A multimodal coupled piezoelectric transducer operating in dual frequencies is proposed. Frequency compensation is achieved by altering the electrical boundaries of passive piezoelectric ceramics, overcoming the resonance frequency drift problem during high-power operation, and stable DFUS is generated. Experimental results demonstrate the impact of the second harmonic phase on levitation heights, revealing that optimized phase adjustments can significantly influence levitation height, with the optimal phase around 280°. With a radius of the acoustic radiation surface of 5 mm, and a gravitational load of 0.909 N, the results indicate that when a fundamental vibration with an amplitude of 3 μm is superimposed with a second harmonic of the same amplitude, DFUS at the optimal phase enhances levitation performance compared to single-frequency ultrasound (SFUS), with the increment rate of the levitation height reaching up to 78.5 % in the experiments. This study confirms the feasibility of DFUS for improving the performance of NFAL systems and lays the groundwork for future applications of dual-frequency ultrasound levitation.
KW - Acoustic levitation
KW - Dual-frequency ultrasound
KW - Piezoelectric transducer
KW - Vibration control
UR - http://www.scopus.com/inward/record.url?scp=85215360709&partnerID=8YFLogxK
U2 - 10.1016/j.sna.2025.116224
DO - 10.1016/j.sna.2025.116224
M3 - Article
AN - SCOPUS:85215360709
VL - 383
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
SN - 0924-4247
M1 - 116224
ER -