Experimental Investigation of the Rapid Fabrication of Micronand Submicron Structures on Polymers Utilizing Ultrasonic Assisted Embossing

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OriginalspracheEnglisch
Aufsatznummer2417
FachzeitschriftPolymers
Jahrgang13
Ausgabenummer15
Frühes Online-Datum23 Juli 2021
PublikationsstatusVeröffentlicht - 1 Aug. 2021

Abstract

Small-scale optical components with micron or submicron features have grown in popularity in recent years. High-quality, high-efficient, and cost-effective processing approaches for polymer optics mass production are an urgent need. In this study, ultrasonic vibration will be introduced in embossing. The major advantage is that the required energy can be provided for process times ranging from a few hundred milliseconds to a few seconds, and that the process energy is provided at exactly the required location so that the structures in the surrounding area are not affected. Due to the strong correlation between electrical impedance and the temperature of the material, a novel impedance-based control strategy has been utilized for precisely controlling ultrasonic vibration during the embossing process. The investigation used two types of stamps with grating line widths of 4 µm and 500 nm, respectively. As a result, an embossing time of less than a few seconds was accomplished and a uniform embossed surface with an average fill rate of more than 75% could be achieved.

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Experimental Investigation of the Rapid Fabrication of Micronand Submicron Structures on Polymers Utilizing Ultrasonic Assisted Embossing. / Zhu, Yongyong; Bengsch, Sebastian; Zheng, Lei et al.
in: Polymers, Jahrgang 13, Nr. 15, 2417, 01.08.2021.

Publikation: Beitrag in FachzeitschriftArtikelForschungPeer-Review

Zhu Y, Bengsch S, Zheng L, Long Y, Roth BW, Wurz MC et al. Experimental Investigation of the Rapid Fabrication of Micronand Submicron Structures on Polymers Utilizing Ultrasonic Assisted Embossing. Polymers. 2021 Aug 1;13(15):2417. Epub 2021 Jul 23. doi: 10.3390/polym13152417
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title = "Experimental Investigation of the Rapid Fabrication of Micronand Submicron Structures on Polymers Utilizing Ultrasonic Assisted Embossing",
abstract = "Small-scale optical components with micron or submicron features have grown in popularity in recent years. High-quality, high-efficient, and cost-effective processing approaches for polymer optics mass production are an urgent need. In this study, ultrasonic vibration will be introduced in embossing. The major advantage is that the required energy can be provided for process times ranging from a few hundred milliseconds to a few seconds, and that the process energy is provided at exactly the required location so that the structures in the surrounding area are not affected. Due to the strong correlation between electrical impedance and the temperature of the material, a novel impedance-based control strategy has been utilized for precisely controlling ultrasonic vibration during the embossing process. The investigation used two types of stamps with grating line widths of 4 µm and 500 nm, respectively. As a result, an embossing time of less than a few seconds was accomplished and a uniform embossed surface with an average fill rate of more than 75% could be achieved.",
keywords = "Embossing, Impedance-based control, Keywords: ultrasonic vibration, Micron and submicron structure",
author = "Yongyong Zhu and Sebastian Bengsch and Lei Zheng and Yangyang Long and Roth, {Bernhard Wilhelm} and Wurz, {Marc Christopher} and Jens Twiefel and J{\"o}rg Wallaschek",
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AU - Bengsch, Sebastian

AU - Zheng, Lei

AU - Long, Yangyang

AU - Roth, Bernhard Wilhelm

AU - Wurz, Marc Christopher

AU - Twiefel, Jens

AU - Wallaschek, Jörg

N1 - Funding Information: Funding: This project funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under Germany’s Excellence Strategy within the Cluster of Excellence PhoenixD (EXC 2122, Project ID 390833453). Funding Information: Acknowledgments: The authors would like to thank the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) for the financial and organizational support of this project.

PY - 2021/8/1

Y1 - 2021/8/1

N2 - Small-scale optical components with micron or submicron features have grown in popularity in recent years. High-quality, high-efficient, and cost-effective processing approaches for polymer optics mass production are an urgent need. In this study, ultrasonic vibration will be introduced in embossing. The major advantage is that the required energy can be provided for process times ranging from a few hundred milliseconds to a few seconds, and that the process energy is provided at exactly the required location so that the structures in the surrounding area are not affected. Due to the strong correlation between electrical impedance and the temperature of the material, a novel impedance-based control strategy has been utilized for precisely controlling ultrasonic vibration during the embossing process. The investigation used two types of stamps with grating line widths of 4 µm and 500 nm, respectively. As a result, an embossing time of less than a few seconds was accomplished and a uniform embossed surface with an average fill rate of more than 75% could be achieved.

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KW - Impedance-based control

KW - Keywords: ultrasonic vibration

KW - Micron and submicron structure

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